- 专利标题: GaN-based power electronic device and method for manufacturing the same
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申请号: US15368098申请日: 2016-12-02
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公开(公告)号: US10062775B2公开(公告)日: 2018-08-28
- 发明人: Sen Huang , Xinyu Liu , Xinhua Wang , Ke Wei , Qilong Bao , Wenwu Wang , Chao Zhao
- 申请人: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- 申请人地址: CN Beijing
- 专利权人: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- 当前专利权人: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- 当前专利权人地址: CN Beijing
- 代理机构: Hamre, Schumann, Mueller & Larson, P.C.
- 优先权: CN201610265883 20160426
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L29/00 ; H01L29/778 ; H01L29/66 ; H01L29/205 ; H01L29/20 ; H01L29/15 ; H01L21/306
摘要:
A GaN-based power electronic device and a method for manufacturing the same is provided. The GaN-based power electronic device comprising a substrate and an epitaxial layer over the substrate. The epitaxial layer comprises a GaN-based heterostructure layer, a superlattice structure layer and a P-type cap layer. The superlattice structure layer is provided over the heterostructure layer, and the P-type cap layer is provided over the superlattice structure layer. By using this electronic device, gate voltage swing and safe gate voltage range of the GaN-based power electronic device manufactured on the basis of the P-type cap layer technique may be further extended, and dynamic characteristics of the device may be improved. Therefore, application process for the GaN-based power electronic device that is based on the P-type cap layer technique will be promoted.
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