Invention Grant
- Patent Title: Semiconductor device and method for fabricating the same
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Application No.: US15168694Application Date: 2016-05-31
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Publication No.: US10062786B2Publication Date: 2018-08-28
- Inventor: Ju-Hyun Kim , Ho-Young Kim , Se-Jung Park , Bo-Un Yoon
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Onello & Mello, LLP
- Priority: KR10-2015-0081785 20150610
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L29/423 ; H01L29/66 ; H01L29/78 ; H01L21/762

Abstract:
A semiconductor device includes a first fin-type pattern on a substrate, having a first sidewall and a second sidewall opposed to each other; a first trench formed in contact with the first sidewall; a second trench formed in contact with the second sidewall; a first field insulating layer partially filling the first trench; and a second field insulating layer partially filling the second trench and a second field insulating layer partially filling the second trench. The second field insulating layer includes a first region and a second region disposed in a sequential order starting from the second sidewall, an upper surface of the second region being higher than an upper surface of the first field insulating layer. The device further includes a gate electrode on the first fin-type pattern, the first field insulating layer and the second field insulating layer, the gate electrode intersecting the first fin-type pattern and overlapping the second region.
Public/Granted literature
- US20160365453A1 SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2016-12-15
Information query
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