Invention Grant
- Patent Title: Substrate transport apparatus
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Application No.: US14071314Application Date: 2013-11-04
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Publication No.: US10065307B2Publication Date: 2018-09-04
- Inventor: Ulysses Gilchrist , Christopher Hofmeister
- Applicant: Brooks Automation Inc.
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation Inc.
- Current Assignee: Brooks Automation Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Perman & Green, LLP
- Agent Colin Durham
- Main IPC: B25J9/04
- IPC: B25J9/04 ; B25J9/08 ; B25J9/10 ; B25J18/04 ; H01L21/677 ; B25J9/00

Abstract:
A substrate transport apparatus having a frame, a drive section and an articulated arm. The drive section has at least one motor module that is selectable for placement in the drive section from a number of different interchangeable motor modules. Each having a different predetermined characteristic. The articulated arm has articulated joints. The arm is connected to the drive section for articulation. The arm has a selectable configuration selectable from a number of different arm configurations each having a predetermined configuration characteristic. The selection of the arm configuration is effected by selection of the at least one motor module for placement in the drive section.
Public/Granted literature
- US20140126987A1 SUBSTRATE TRANSPORT APPARATUS Public/Granted day:2014-05-08
Information query
IPC分类: