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    Reduced capacity carrier, transport, load port, buffer system
    1.
    发明授权
    Reduced capacity carrier, transport, load port, buffer system 有权

    公开(公告)号：US10679882B2

    公开(公告)日：2020-06-09

    申请号：US14976952

    申请日：2015-12-21

    Applicant: Brooks Automation, Inc.

    Inventor： Michael L. Bufano ,  Ulysses Gilchrist ,  William Fosnight ,  Christopher Hofmeister ,  Daniel Babbs ,  Robert C. May

    IPC: H01L21/677

    Abstract: In accordance with an exemplary embodiment a semiconductor workpiece processing system having at least one processing tool for processing semiconductor workpieces, a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool and a first transport section elongated and defining a travel direction. The first transport section has parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool. The container is in substantially continuous transport at a substantially constant rate in the travel direction, when supported by the first transport section. A second transport section is connected to the at least one process tool for transporting the container to and from the at least one processing tool.

    Load lock fast pump vent
    4.
    发明授权
    Load lock fast pump vent 有权
    加载锁快泵通风口

    公开(公告)号：US08662812B2

    公开(公告)日：2014-03-04

    申请号：US13625704

    申请日：2012-09-24

    Applicant: Brooks Automation, Inc.

    Inventor： Christopher Hofmeister ,  Martin R. Elliot ,  Alexander Krupyshev ,  Joseph Hallisey ,  Joseph A. Kraus ,  William Fosnight ,  Craig J. Carbone ,  Jeffrey C. Blahnik ,  Ho Yin Owen Fong

    IPC: H01L21/67 ,  F16K25/00

    CPC classification number: H01L21/67098 ,  H01L21/67126 ,  H01L21/6719 ,  H01L21/67201

    Abstract: A semiconductor processing tool is disclosed, the tool having a frame forming at least one chamber with an opening and having a sealing surface around a periphery of the opening, a door configured to interact with the sealing surface for sealing the opening, the door having sides perpendicular to the door sealing surface and perpendicular to a transfer plane of a substrate, and at least one drive located on the frame to a side of at least one of the sides that are substantially perpendicular to the door sealing surface and substantially perpendicular to the transfer plane of the substrate, the drive having actuators located at least partially in front of the sealing surface and the actuators being coupled to one of the sides of the door for moving the door from a sealed position. The at least one drive is located outside of a substrate transfer zone.

    Abstract translation: 公开了一种半导体加工工具，所述工具具有框架，所述框架形成具有开口的至少一个室，并且具有围绕所述开口的周边的密封表面;门构造成与所述密封表面相互作用以密封所述开口，所述门具有侧面 垂直于所述门密封表面并垂直于衬底的传输平面的至少一个驱动器，以及位于所述框架上的至少一个侧面的至少一个驱动器，所述驱动器基本上垂直于所述门密封表面并且基本上垂直于所述传送 所述驱动器具有至少部分地位于所述密封表面前面的致动器，并且所述致动器联接到所述门的一侧以将所述门从密封位置移动。 至少一个驱动器位于衬底转移区的外部。

    Compact substrate transport system
    7.
    发明授权
    Compact substrate transport system 有权

    公开(公告)号：US09401294B2

    公开(公告)日：2016-07-26

    申请号：US14058436

    申请日：2013-10-21

    Applicant: Brooks Automation, Inc.

    Inventor： Christopher Hofmeister ,  Alexander Krupyshev ,  Ulysses Gilchrist

    IPC: H01L21/677 ,  H01L21/67

    CPC classification number: H01L21/677 ,  H01L21/6719 ,  H01L21/67201 ,  H01L21/67742 ,  H01L21/67766 ,  H01L21/67775

    Abstract: A substrate processing system including a load port module configured to hold at least one substrate container for storing and transporting substrates, a substrate processing chamber, an isolatable transfer chamber capable of holding an isolated atmosphere therein configured to couple the substrate processing chamber and the load port module, and a substrate transport mounted at least partially within the transfer chamber having a drive section fixed to the transfer chamber and having a SCARA arm configured to support at least one substrate, the SCARA arm being configured to transport the at least one substrate between the at least one substrate container and the processing chamber with but one touch of the at least one substrate, wherein the SCARA arm comprises a first arm link, a second arm link, and at least one end effector serially pivotally coupled to each other, where the first and second arm links have unequal lengths.

    Elevator-based tool loading and buffering system
    8.
    发明授权
    Elevator-based tool loading and buffering system 有权
    电梯工具装载和缓冲系统

    公开(公告)号：US09368382B2

    公开(公告)日：2016-06-14

    申请号：US14223553

    申请日：2014-03-24

    Applicant: Brooks Automation, Inc.

    Inventor： Gerald M. Friedman ,  Michael L. Bufano ,  Christopher Hofmeister ,  Ulysses Gilchrist ,  William Fosnight

    IPC: B65G47/10 ,  H01L21/677 ,  B65G47/50 ,  H01L21/67

    CPC classification number: H01L21/677 ,  B65G47/50 ,  H01L21/67276 ,  H01L21/67769 ,  H01L21/67772 ,  H01L21/67775 ,  Y10S414/14

    Abstract: A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier so the at least one substrate transport carrier is capable of being coupled to the load port interface without lifting the at least one substrate transport carrier off the carrier holding station. The carrier holding station is arranged to provide a substantially simultaneous swap section for substantially simultaneous replacement of the substrate transport carrier from the carrier holding station.

    Abstract translation: 提供了一种基板处理装置。 该装置具有壳体，低端口接口和载体保持站。 壳体具有用于处理基板的处理装置。 负载端口接口连接到外壳，用于将基板装载到处理设备中。 托架保持站连接到外壳。 载体保持站用于保持至少一个基板输送载体，使得至少一个基板输送载体能够耦合到负载端口接口，而不将至少一个基板传输载体从载体保持站提起。 载体保持站布置成提供基本上同时的交换部分，用于基本上同时从载体保持站更换基板传输载体。

    Substrate processing apparatus
    9.
    发明授权
    Substrate processing apparatus 有权
    基板加工装置

    公开(公告)号：US08827617B2

    公开(公告)日：2014-09-09

    申请号：US13764373

    申请日：2013-02-11

    Applicant: Brooks Automation, Inc.

    Inventor： Christopher Hofmeister ,  Robert T. Caveney

    IPC: H01L21/677 ,  H01L21/67

    CPC classification number: H01L21/677 ,  H01L21/67161 ,  H01L21/67167 ,  H01L21/67173 ,  H01L21/67184 ,  H01L21/67709 ,  H01L21/67724 ,  H01L21/67727 ,  H01L21/67742 ,  H01L21/67766 ,  Y10S414/139

    Abstract: A substrate processing apparatus including a transport chamber having an end and defining more than one substantially linear substrate transport zone where each transport zone extends longitudinally along the transport chamber between opposing walls of the transport chamber and at least one of the more than one substantially linear substrate transport zones is configured as a supply zone for enabling transport of substrates from the end and at least one of the more than one substantially linear substrate transport zones is configured as a return zone for enabling transport of substrates to the end, and at least one substrate transport located in and movably mounted to the transport chamber for transporting substrates along the more than one substantially linear substrate transport zone, where each substrate transport zone is configured to allow the at least one substrate transport to move from one transport zone to another transport zone.

    Abstract translation: 一种基板处理设备，包括具有端部并且限定多于一个基本上线性的基板输送区域的输送室，其中每个输送区域沿着输送室在输送室的相对壁之间纵向延伸，并且多于一个基本上线性的基板 运输区域被配置为用于使得能够从端部传送基板的供应区域，并且多于一个的基本线性的基板输送区域中的至少一个被配置为用于使基板传送到端部的返回区域，以及至少一个基板 位于并可移动地安装到输送室的输送器，用于沿着多于一个的基本上线性的基底输送区输送基底，其中每个基底输送区被配置为允许至少一个基底输送从一个输送区移动到另一个输送区。

    SUBSTRATE TRANSPORT APPARATUS
    10.
    发明申请
    SUBSTRATE TRANSPORT APPARATUS 审中-公开
    基座运输装置

    公开(公告)号：US20140126987A1

    公开(公告)日：2014-05-08

    申请号：US14071314

    申请日：2013-11-04

    Applicant: Brooks Automation Inc.

    Inventor： Ulysses Gilchrist ,  Christopher Hofmeister

    IPC: H01L21/677

    CPC classification number: B25J9/042 ,  B25J9/0087 ,  B25J9/08 ,  B25J9/10 ,  B25J9/104 ,  B25J18/04 ,  H01L21/67742 ,  Y10S901/15 ,  Y10S901/23 ,  Y10S901/28 ,  Y10T74/20305 ,  Y10T74/20317 ,  Y10T74/20329

    Abstract: A substrate transport apparatus having a frame, a drive section and an articulated arm. The drive section has at least one motor module that is selectable for placement in the drive section from a number of different interchangeable motor modules. Each having a different predetermined characteristic. The articulated arm has articulated joints. The arm is connected to the drive section for articulation. The arm has a selectable configuration selectable from a number of different arm configurations each having a predetermined configuration characteristic. The selection of the arm configuration is effected by selection of the at least one motor module for placement in the drive section.

    Abstract translation: 具有框架，驱动部和铰接臂的基板输送装置。 驱动部分具有至少一个电动机模块，其可选择用于从多个不同的可互换电动机模块放置在驱动部分中。 每个具有不同的预定特性。 铰接臂具有铰接接头。 臂连接到驱动部分用于铰接。 臂具有可从多个具有预定配置特性的不同臂配置中选择的可选配置。 通过选择用于放置在驱动部分中的至少一个电机模块来实现臂配置的选择。

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