- Patent Title: Transmission electron microscope sample alignment system and method
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Application No.: US15896597Application Date: 2018-02-14
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Publication No.: US10067078B1Publication Date: 2018-09-04
- Inventor: Daliang Zhang , Yu Han , Kun Li , Yihan Zhu
- Applicant: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Applicant Address: SA Thuwal
- Assignee: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Current Assignee: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Current Assignee Address: SA Thuwal
- Agency: Patent Portfolio Builders PLLC
- Main IPC: G01N23/04
- IPC: G01N23/04 ; H01J37/28 ; G01N23/20058 ; H01J37/26 ; H01J37/244

Abstract:
A system and method involve applying an electron beam to a sample and obtaining an image of the sample with the applied electron beam. An orientation of the sample relative to the sample's zone axis is automatically determined based on a distribution of reflections in the image. The orientation of the sample is automatically adjusted to align with the sample's zone axis based on the determined orientation.
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