Invention Grant
- Patent Title: Method of manufacturing a waveguide
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Application No.: US15499261Application Date: 2017-04-27
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Publication No.: US10067291B2Publication Date: 2018-09-04
- Inventor: Cédric Durand , Frédéric Gianesello , Folly Eli Ayi-Yovo
- Applicant: STMicroelectronics SA
- Applicant Address: FR Montrouge
- Assignee: STMicroelectronics SA
- Current Assignee: STMicroelectronics SA
- Current Assignee Address: FR Montrouge
- Agency: Slater Matsil, LLP
- Priority: FR1659923 20161013; FR1659924 20161013
- Main IPC: G02B6/02
- IPC: G02B6/02 ; G02B6/30 ; C03C23/00 ; B23K26/364 ; B23K26/402 ; B23K26/0622 ; B23K103/00

Abstract:
A method of manufacturing a waveguide in a glass plate is disclosed. The glass plate is scanned with a laser beam directed orthogonally to the glass plate to form a trench according to a pattern of the waveguide to be formed. The scanning is performed by pulses of the laser beam having a duration between 2 and 500 femtoseconds. The glass plate with the trench is treated with hydrofluoric acid. After treating the glass plate, the trench is filled with a material having an index different from that of glass, and, after filling the trench, a cladding layer is deposited.
Public/Granted literature
- US20180106969A1 METHOD OF MANUFACTURING A WAVEGUIDE Public/Granted day:2018-04-19
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