公开(公告)号：US20180106954A1

公开(公告)日：2018-04-19

申请号：US15730415

申请日：2017-10-11

Applicant: STMicroelectronics SA

Inventor： Folly Eli Ayi-Yovo ,  Cédric Durand ,  Frédéric Gianesello

IPC: F21V8/00 ,  G02B6/02 ,  G02B6/36

Abstract: The present invention relates to a method for manufacturing an optical device comprising forming a first trench in a glass plate and a second trench perpendicular to the first trench, wherein the first trench has an end opening into the second trench. The trenches are treated with hydrofluoric acid. The first trench is filled with a material to form a waveguide, and a mirror is formed on the wall of the second trench opposite the waveguide. An encapsulation layer is deposited over the glass plate, waveguide and second trench.

公开(公告)号：US20180348437A1

公开(公告)日：2018-12-06

申请号：US16101127

申请日：2018-08-10

Applicant: STMicroelectronics SA

Inventor： Cédric Durand ,  Frédéric Gianesello ,  Folly Eli Ayi-Yovo

IPC: G02B6/30 ,  C03C23/00 ,  B23K26/402 ,  B23K26/0622 ,  B23K26/364 ,  B23K103/00

CPC classification number: G02B6/30 ,  B23K26/0624 ,  B23K26/364 ,  B23K26/402 ,  B23K2103/54 ,  C03C17/09 ,  C03C23/0025

Abstract: A method of manufacturing an optical device is disclosed. The method includes forming a waveguide in a glass plate. The method further includes scanning the glass plate with a laser beam directed at an acute angle with respect to a first surface to form a mirror trench in the glass plate. Scanning the glass plate with the first laser beam includes pulses of the laser beam that have a duration between 2 and 500 femtoseconds. The method also includes filling the mirror trench with a reflective material and depositing a cladding layer over the waveguide and mirror trench.

公开(公告)号：US20200057200A1

公开(公告)日：2020-02-20

申请号：US16662810

申请日：2019-10-24

Applicant: STMicroelectronics SA

Inventor： Cédric Durand ,  Frédéric Gianesello ,  Folly Eli Ayi-Yovo

IPC: G02B6/30 ,  B23K26/0622 ,  B23K26/402 ,  B23K26/364 ,  C03C23/00 ,  G02B6/138 ,  G02B6/136 ,  C03C17/09

Abstract: A method of manufacturing an optical device is disclosed. The method includes scanning along a curved path at a first surface of a glass plate with a laser beam directed orthogonally to the first surface to form a trench according to a pattern of a waveguide. The curved path is coincident with a longitudinal axis of the waveguide. The method further includes filling the trench with a material having an index different from that of glass to form the waveguide and, after filling the trench, depositing a cladding layer.

公开(公告)号：US11774664B2

公开(公告)日：2023-10-03

申请号：US17026819

申请日：2020-09-21

Applicant: STMicroelectronics SA

Inventor： Folly Eli Ayi-Yovo ,  Cédric Durand ,  Frédéric Gianesello

IPC: G02B6/36 ,  G02B6/02 ,  G02B6/30 ,  F21V8/00 ,  B23K26/00 ,  B23K26/364 ,  B23K26/402 ,  B23K26/0622 ,  G02B6/12 ,  B23K103/00

CPC classification number: G02B6/0065 ,  B23K26/00 ,  B23K26/0624 ,  B23K26/364 ,  B23K26/402 ,  G02B6/02152 ,  G02B6/12004 ,  G02B6/30 ,  G02B6/3652 ,  B23K2103/54 ,  G02B2006/12176

Abstract: An embodiment optical device includes a glass plate, a first trench disposed in the glass plate, and a second trench disposed in the glass plate. The second trench crosses the first trench, and the first trench has an open end in a first wall of the second trench. The optical device includes a waveguide disposed inside the first trench, where the waveguide is formed of a material having a refractive index different from that of the glass plate, and a mirror on a second wall of the second trench opposite the first wall and waveguide. The optical device includes an encapsulation layer filling the second trench and covering all of an upper surface of the waveguide and having a refractive index that is different from the waveguide and the glass plate.

公开(公告)号：US10067291B2

公开(公告)日：2018-09-04

申请号：US15499261

申请日：2017-04-27

Applicant: STMicroelectronics SA

Inventor： Cédric Durand ,  Frédéric Gianesello ,  Folly Eli Ayi-Yovo

IPC: G02B6/02 ,  G02B6/30 ,  C03C23/00 ,  B23K26/364 ,  B23K26/402 ,  B23K26/0622 ,  B23K103/00

Abstract: A method of manufacturing a waveguide in a glass plate is disclosed. The glass plate is scanned with a laser beam directed orthogonally to the glass plate to form a trench according to a pattern of the waveguide to be formed. The scanning is performed by pulses of the laser beam having a duration between 2 and 500 femtoseconds. The glass plate with the trench is treated with hydrofluoric acid. After treating the glass plate, the trench is filled with a material having an index different from that of glass, and, after filling the trench, a cladding layer is deposited.

公开(公告)号：US10976494B2

公开(公告)日：2021-04-13

申请号：US16662810

申请日：2019-10-24

Applicant: STMicroelectronics SA

Inventor： Cédric Durand ,  Frédéric Gianesello ,  Folly Eli Ayi-Yovo

IPC: B23K26/364 ,  C03C17/09 ,  G02B6/136 ,  G02B6/138 ,  G02B6/30 ,  C03C23/00 ,  B23K26/402 ,  B23K26/0622 ,  B23K103/00 ,  G02B6/12

Abstract: A method of manufacturing an optical device is disclosed. The method includes scanning along a curved path at a first surface of a glass plate with a laser beam directed orthogonally to the first surface to form a trench according to a pattern of a waveguide. The curved path is coincident with a longitudinal axis of the waveguide. The method further includes filling the trench with a material having an index different from that of glass to form the waveguide and, after filling the trench, depositing a cladding layer.

公开(公告)号：US20210003770A1

公开(公告)日：2021-01-07

申请号：US17026819

申请日：2020-09-21

Applicant: STMicroelectronics SA

Inventor： Folly Eli Ayi-Yovo ,  Cédric Durand ,  Frédéric Gianesello

IPC: F21V8/00 ,  G02B6/36 ,  G02B6/02 ,  G02B6/30 ,  B23K26/00 ,  B23K26/364 ,  B23K26/402 ,  B23K26/0622 ,  G02B6/12

Abstract: An embodiment optical device includes a glass plate, a first trench disposed in the glass plate, and a second trench disposed in the glass plate. The second trench crosses the first trench, and the first trench has an open end in a first wall of the second trench. The optical device includes a waveguide disposed inside the first trench, where the waveguide is formed of a material having a refractive index different from that of the glass plate, and a mirror on a second wall of the second trench opposite the first wall and waveguide. The optical device includes an encapsulation layer filling the second trench and covering all of an upper surface of the waveguide and having a refractive index that is different from the waveguide and the glass plate.

公开(公告)号：US10782468B2

公开(公告)日：2020-09-22

申请号：US15730415

申请日：2017-10-11

Applicant: STMicroelectronics SA

Inventor： Folly Eli Ayi-Yovo ,  Cédric Durand ,  Frédéric Gianesello

IPC: F21V8/00 ,  G02B6/02 ,  G02B6/36 ,  G02B6/30 ,  B23K26/00 ,  B23K26/364 ,  B23K26/402 ,  B23K26/0622 ,  G02B6/12 ,  B23K103/00

Abstract: The present invention relates to a method for manufacturing an optical device comprising forming a first trench in a glass plate and a second trench perpendicular to the first trench, wherein the first trench has an end opening into the second trench. The trenches are treated with hydrofluoric acid. The first trench is filled with a material to form a waveguide, and a mirror is formed on the wall of the second trench opposite the waveguide. An encapsulation layer is deposited over the glass plate, waveguide and second trench.

公开(公告)号：US20180106969A1

公开(公告)日：2018-04-19

申请号：US15499261

申请日：2017-04-27

Applicant: STMicroelectronics SA

Inventor： Cédric Durand ,  Frédéric Gianesello ,  Folly Eli Ayi-Yovo

IPC: G02B6/30 ,  C03C23/00 ,  B23K26/364 ,  B23K26/402 ,  B23K26/0622

CPC classification number: G02B6/30 ,  B23K26/0624 ,  B23K26/364 ,  B23K26/402 ,  B23K2103/54 ,  C03C17/09 ,  C03C23/0025

Abstract: A method of manufacturing a waveguide in a glass plate is disclosed. The glass plate is scanned with a laser beam directed orthogonally to the glass plate to form a trench according to a pattern of the waveguide to be formed. The scanning is performed by pulses of the laser beam having a duration between 2 and 500 femtoseconds. The glass plate with the trench is treated with hydrofluoric acid. After treating the glass plate, the trench is filled with a material having an index different from that of glass, and, after filling the trench, a cladding layer is deposited.