- 专利标题: Polishing pad and method for producing polishing pad
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申请号: US14385894申请日: 2013-03-26
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公开(公告)号: US10071460B2公开(公告)日: 2018-09-11
- 发明人: Teppei Tateno , Hirohito Miyasaka , Ryuma Matsuoka , Yoshie Kanazawa , Fumio Miyazawa
- 申请人: FUJIBO HOLDINGS, INC.
- 申请人地址: JP Chuo-ku, Tokyo
- 专利权人: FUJIBO HOLDINGS, INC.
- 当前专利权人: FUJIBO HOLDINGS, INC.
- 当前专利权人地址: JP Chuo-ku, Tokyo
- 代理机构: Buchanan, Ingersoll & Rooney PC
- 优先权: JP2012-070037 20120326
- 国际申请: PCT/JP2013/058690 WO 20130326
- 国际公布: WO2013/146733 WO 20131003
- 主分类号: B24B1/00
- IPC分类号: B24B1/00 ; B24D3/00 ; B24B37/24 ; C08G18/48 ; C08G18/76 ; C08G18/42 ; C08G18/44 ; C08L75/04 ; C08L75/06
摘要:
Provided are a method for producing a finish polishing pad and the polishing pad which allow formation of a stable film and enables polishing with fewer polishing scratches. The method includes the steps of: dissolving a composition for forming polyurethane resin film containing a polyurethane resin and an additive(s) in a solvent capable of dissolving the resin; removing an insoluble component(s) to make the content of the insoluble component(s) in the solution less than 1% by mass relative to the total mass of the composition; adding a poor solvent to the solution from which the insoluble component(s) has(have) been removed, followed by mixing, the amount of the poor solvent added being calculated according to a defined Formula 1; and forming a film from the mixture solution on the film formation substrate by a wet coagulation method, to thereby form the polyurethane resin film.
公开/授权文献
- US20150068129A1 POLISHING PAD AND METHOD FOR PRODUCING POLISHING PAD 公开/授权日:2015-03-12
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