Invention Grant
- Patent Title: Low stiffness flexure
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Application No.: US14677730Application Date: 2015-04-02
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Publication No.: US10071903B2Publication Date: 2018-09-11
- Inventor: Xiaolei Liu , Roman Gutierrez , Guiqin Wang , Benson Mai , Matthew Ng
- Applicant: MEMS DRIVE, INC.
- Applicant Address: US CA Arcadia
- Assignee: MEMS Drive, Inc.
- Current Assignee: MEMS Drive, Inc.
- Current Assignee Address: US CA Arcadia
- Agency: Holland & Knight LLP
- Agent Brian J. Colandreo; Michael T. Abramson
- Main IPC: B81B3/00
- IPC: B81B3/00

Abstract:
A flexure includes a support first end connected to a first frame; a support second end connected to a second frame; and a buckled section connecting the first support end to the second support end. The length of the flexure is substantially greater than its width, and the width of the flexure is substantially greater than its thickness. During operation, the flexure is maintained in a buckled state where the flexure's stiffness is significantly less than in the unbuckled state. In one implementation, a stage includes a flexure array joining a first frame and a second frame, where: the first frame and the second frame are substantially on a plane; the flexure array is substantially on the plane prior to buckling by the flexures of the flexure array; and the flexure array is bent substantially out of the plane after buckling by the flexures.
Public/Granted literature
- US20150321900A1 LOW STIFFNESS FLEXURE Public/Granted day:2015-11-12
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