- 专利标题: Vertical memory devices and methods of manufacturing the same
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申请号: US15271605申请日: 2016-09-21
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公开(公告)号: US10079203B2公开(公告)日: 2018-09-18
- 发明人: Yong-Hoon Son , Cha-Dong Yeo , Han-Mei Choi , Kyung-Hyun Kim , Phil-Ouk Nam , Kwang-Chul Park , Yeon-Sil Sohn , Jin-I Lee , Won-Bong Jung
- 申请人: Yong-Hoon Son , Cha-Dong Yeo , Han-Mei Choi , Kyung-Hyun Kim , Phil-Ouk Nam , Kwang-Chul Park , Yeon-Sil Sohn , Jin-I Lee , Won-Bong Jung
- 申请人地址: KR Gyeonggie-do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Gyeonggie-do
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: KR10-2015-0134754 20150923
- 主分类号: H01L23/522
- IPC分类号: H01L23/522 ; H01L27/11582 ; H01L21/768 ; H01L27/11565 ; H01L27/11575 ; H01L27/1157
摘要:
A vertical memory device includes a substrate, a plurality of channels on the substrate and extending in a vertical direction with respect to a top surface of the substrate, a plurality of non-metal gate patterns surrounding the channels and being stacked on top of each other and spaced apart from each other along the vertical direction, and a plurality of metal gate patterns stacked on top of each other. The metal gate patterns are spaced apart from each other along the vertical direction. Each of the metal gate patterns surrounds a corresponding one of the non-metal gate patterns.
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