Invention Grant
- Patent Title: Asymmetric FET
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Application No.: US15685450Application Date: 2017-08-24
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Publication No.: US10079280B2Publication Date: 2018-09-18
- Inventor: Kangguo Cheng , Joseph Ervin , Juntao Li , Chengwen Pei , Geng Wang
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Steven J. Meyers
- Main IPC: H01L29/08
- IPC: H01L29/08 ; H01L29/78 ; H01L29/66 ; H01L29/06 ; H01L21/3105 ; H01L21/306 ; H01L29/167 ; H01L29/165 ; H01L21/02 ; H01L23/535 ; H01L23/528 ; H01L29/739 ; H01L23/485

Abstract:
After forming a first-side epitaxial semiconductor region and a second-side epitaxial semiconductor region on recessed surfaces of a semiconductor portion that are not covered by a gate structure, at least one dielectric layer is formed to cover the first-side and the second-side epitaxial semiconductor regions and the gate structure. A second-side contact opening is formed within the at least one dielectric layer to expose an entirety of the second-side epitaxial semiconductor region. The exposed second-side epitaxial semiconductor region can be replaced by a new second-side epitaxial semiconductor region having a composition different from the first-side epitaxial semiconductor region or can be doped by additional dopants, thus creating an asymmetric first-side epitaxial semiconductor region and a second-side epitaxial semiconductor region. Each of the first-side epitaxial semiconductor region and the second-side epitaxial semiconducting region can function as either a source or a drain for a transistor.
Public/Granted literature
- US20170373148A1 ASYMMETRIC FET Public/Granted day:2017-12-28
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