Single poly nonvolatile memory device
摘要:
A single-poly NVM cell includes a select transistor and a floating gate transistor serially connected to the select transistor. The select transistor includes a select gate, a select gate oxide layer, a source doping region, a first LDD region merged with the source doping region, a commonly-shared doping region, and a second LDD region merged with the commonly-shared doping region. The floating gate transistor includes a floating gate, a floating gate oxide layer, the commonly-shared doping region, a third LDD region merged with the commonly-shared doping region, and a drain doping region. A drain-side extension modified region is disposed under the spacer and in proximity to the drain doping region.
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