- 专利标题: Single poly nonvolatile memory device
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申请号: US15293299申请日: 2016-10-14
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公开(公告)号: US10083757B2公开(公告)日: 2018-09-25
- 发明人: Kuan-Hsun Chen , Ming-Shan Lo , Ting-Ting Su
- 申请人: eMemory Technology Inc.
- 申请人地址: TW Hsin-Chu
- 专利权人: eMemory Technology Inc.
- 当前专利权人: eMemory Technology Inc.
- 当前专利权人地址: TW Hsin-Chu
- 代理商 Winston Hsu
- 主分类号: H01L27/115
- IPC分类号: H01L27/115 ; G11C16/14 ; H01L29/423 ; H01L29/45 ; H01L29/78 ; H01L29/788 ; G11C16/04 ; G11C16/10
摘要:
A single-poly NVM cell includes a select transistor and a floating gate transistor serially connected to the select transistor. The select transistor includes a select gate, a select gate oxide layer, a source doping region, a first LDD region merged with the source doping region, a commonly-shared doping region, and a second LDD region merged with the commonly-shared doping region. The floating gate transistor includes a floating gate, a floating gate oxide layer, the commonly-shared doping region, a third LDD region merged with the commonly-shared doping region, and a drain doping region. A drain-side extension modified region is disposed under the spacer and in proximity to the drain doping region.
公开/授权文献
- US20170110467A1 SINGLE-POLY NONVOLATILE MEMORY DEVICE 公开/授权日:2017-04-20
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