- 专利标题: Methods for forming nanotube fabric layers with increased density
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申请号: US15357003申请日: 2016-11-21
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公开(公告)号: US10084138B2公开(公告)日: 2018-09-25
- 发明人: Thomas Rueckes , H. Montgomery Manning , Rahul Sen
- 申请人: Nantero Inc.
- 申请人地址: US MA Woburn
- 专利权人: Nantero, Inc.
- 当前专利权人: Nantero, Inc.
- 当前专利权人地址: US MA Woburn
- 代理机构: Nantero, Inc.
- 主分类号: H01L51/00
- IPC分类号: H01L51/00 ; H01L51/10 ; H01L51/05 ; H01L29/16 ; H01L29/06 ; H01L21/02 ; B82Y10/00 ; H01L45/00 ; H01L29/10 ; B82Y40/00
摘要:
Methods for passivating a nanotube fabric layer within a nanotube switching device to prevent or otherwise limit the encroachment of an adjacent material layer are disclosed. In some embodiments, a sacrificial material is implanted within a porous nanotube fabric layer to fill in the voids within the porous nanotube fabric layer while one or more other material layers are applied adjacent to the nanotube fabric layer. Once the other material layers are in place, the sacrificial material is removed. In other embodiments, a non-sacrificial filler material (selected and deposited in such a way as to not impair the switching function of the nanotube fabric layer) is used to form a barrier layer within a nanotube fabric layer. In other embodiments, individual nanotube elements are combined with and nanoscopic particles to limit the porosity of a nanotube fabric layer.
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