Invention Grant
- Patent Title: Method of manufacturing a UV curable CMP polishing pad
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Application No.: US14575608Application Date: 2014-12-18
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Publication No.: US10086500B2Publication Date: 2018-10-02
- Inventor: Mahendra Christopher Orilall , Rajeev Bajaj , Fred C. Redeker
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- Main IPC: B24D11/00
- IPC: B24D11/00 ; B24D3/32 ; B29C35/08

Abstract:
A method of fabricating a chemical mechanical polishing pad includes introducing polymer precursors containing acrylate functional groups into a mold, providing abrasive particles and a photo-initiator in the polymer precursors to form a mixture, and while the mixture is contained between a bottom plate and a top cover of the mold, exposing the mixture to ultraviolet radiation through a transparent section of the mold to cause the polymer precursors to form radicals, forming a polymer matrix from the polymer precursor by causing the radicals to cross-link with one another. The polishing layer includes the polymer matrix having the abrasive particles dispersed therein.
Public/Granted literature
- US20160176021A1 UV CURABLE CMP POLISHING PAD AND METHOD OF MANUFACTURE Public/Granted day:2016-06-23
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