- 专利标题: Prevent and remove organics from reservoir wells
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申请号: US14523061申请日: 2014-10-24
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公开(公告)号: US10087546B2公开(公告)日: 2018-10-02
- 发明人: Charles L. Arvin , Glen N. Biggs , Phillip W. Palmatier , Joseph C. Sorbello , Tracy A. Tong , Freddie Torres
- 申请人: International Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Scully, Scott, Murphy & Presser, P.C.
- 代理商 Steven J. Meyers
- 主分类号: C25D21/14
- IPC分类号: C25D21/14 ; C25D17/00 ; C25D21/18 ; C25D17/02 ; C25D21/08 ; C25D21/10
摘要:
Plating bath and well structures and methods are described to stop the organic compounds present in plating reservoir wells or bath solution from rising, i.e., climbing up the reservoir wall. An electroplating apparatus includes a vessel holding a liquid solution including metal plating material and an organic species, and a method of operating an electroplating apparatus. The apparatus is designed with plating bath and structures and methods to stop the organic compounds present in plating reservoir wells or bath solution from rising, i.e., climbing or wicking up the inner surfaces of reservoir walls, and to wash them back down on a continuous or cyclical basis in order to maintain a concentration of organic compounds in the plating solution within upper and lower specification limits.
公开/授权文献
- US20160115617A1 PREVENT AND REMOVE ORGANICS FROM RESERVOIR WELLS 公开/授权日:2016-04-28
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