- Patent Title: Method and apparatus for substrate transfer and radical confinement
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Application No.: US13985843Application Date: 2012-02-29
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Publication No.: US10090181B2Publication Date: 2018-10-02
- Inventor: Jared Ahmad Lee , Martin Jeffrey Salinas , Paul B. Reuter , Imad Yousif , Aniruddha Pal
- Applicant: Jared Ahmad Lee , Martin Jeffrey Salinas , Paul B. Reuter , Imad Yousif , Aniruddha Pal
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- International Application: PCT/US2012/027097 WO 20120229
- International Announcement: WO2012/148568 WO 20121101
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/683 ; H01L21/677 ; C23C16/455 ; C23C16/458 ; H01L21/687 ; H01L21/306
Abstract:
Embodiments of the present invention provide an apparatus for transferring substrates and confining a processing environment in a chamber. One embodiment of the present invention provides a hoop assembly for using a processing chamber. The hoop assembly includes a confinement ring defining a confinement region therein, and three or more lifting fingers attached to the hoop. The three or more lifting fingers are configured to support a substrate outside the inner volume of the confinement ring.
Public/Granted literature
- US20140087561A1 METHOD AND APPARATUS FOR SUBSTRATE TRANSFER AND RADICAL CONFINEMENT Public/Granted day:2014-03-27
Information query
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