Semiconductor device
Abstract:
A semiconductor device includes an insulating layer on a substrate, a first channel pattern on the insulating layer and contacting the insulating layer, second channel patterns on the first channel pattern and being horizontally spaced apart from each other, a gate pattern on the insulating layer and surrounding the second channel patterns, and a source/drain pattern between the second channel patterns.
Public/Granted literature
Information query
Patent Agency Ranking
0/0