- 专利标题: MOSFET and method for manufacturing the same
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申请号: US13510407申请日: 2011-11-18
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公开(公告)号: US10096717B2公开(公告)日: 2018-10-09
- 发明人: Huilong Zhu , Qingqing Liang , Haizhou Yin , Zhijiong Luo
- 申请人: Huilong Zhu , Qingqing Liang , Haizhou Yin , Zhijiong Luo
- 申请人地址: CN Beijing
- 专利权人: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- 当前专利权人: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- 当前专利权人地址: CN Beijing
- 代理机构: Schwegman Lundberg & Woessner, P.A.
- 优先权: CN201110308827 20111012
- 国际申请: PCT/CN2011/082417 WO 20111118
- 国际公布: WO2013/053167 WO 20130418
- 主分类号: H01L21/336
- IPC分类号: H01L21/336 ; H01L29/786 ; H01L21/265 ; H01L29/66 ; H01L21/74
摘要:
The present disclosure discloses a MOSFET and a method for manufacturing the same, wherein the MOSFET comprises: an SOI wafer comprising a semiconductor substrate, a buried insulating layer on the semiconductor substrate, and a semiconductor layer on the buried insulating layer; a gate stack on the semiconductor layer; a source region and a drain region in the semiconductor layer on both sides of the gate stack; and a channel region in the semiconductor layer and located between the source region and the drain region, wherein the MOSFET further comprises a back gate which is located in the semiconductor substrate and has a first doped region as a lower portion of the back gate and a second doped region as an upper portion of the back gate, and the second doped region of the back gate is self-aligned with the gate stack. The MOSFET can adjust a threshold voltage by changing doping type and doping concentration of the back gate.
公开/授权文献
- US20130093002A1 MOSFET AND METHOD FOR MANUFACTURING THE SAME 公开/授权日:2013-04-18
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