发明授权
- 专利标题: Low temperature polysilicon array substrate and method for manufacturing the same
-
申请号: US15327459申请日: 2016-12-29
-
公开(公告)号: US10134907B2公开(公告)日: 2018-11-20
- 发明人: Yuan Guo
- 申请人: Wuhan China Star Optoelectronics Technology Co., Ltd.
- 申请人地址: CN
- 专利权人: WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- 当前专利权人: WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- 当前专利权人地址: CN
- 代理机构: Kim Winston LLP
- 国际申请: PCT/CN2016/112991 WO 20161229
- 国际公布: WO2018/119866 WO 20180705
- 主分类号: H01L31/062
- IPC分类号: H01L31/062 ; H01L29/786 ; H01L27/12 ; H01L29/66 ; G02F1/1368 ; H01L21/02 ; H01L29/78
摘要:
Disclosed is a low temperature polysilicon array substrate and its manufacturing method. The method includes: forming a light-shielding layer, a buffer layer and U-type polysilicon patterns successively on a glass substrate; doping channels of the U-type polysilicon patterns in the active area and then heavily N+ doping these U-type polysilicon patterns; forming a gate insulation layer and etching first via holes; forming a gate line, a source and lightly-doped regions of the N-type double-gate transistor; and heavily P+ doping U-type polysilicon patterns in the non-active area.
公开/授权文献
信息查询
IPC分类: