- 专利标题: Thermal spray material, thermal spray coating and thermal spray coated article
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申请号: US15142181申请日: 2016-04-29
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公开(公告)号: US10138167B2公开(公告)日: 2018-11-27
- 发明人: Nobuyuki Nagayama , Hiroyuki Ibe , Kazuyuki Tsuzuki
- 申请人: TOKYO ELECTRON LIMITED , FUJIMI INCORPORATED
- 申请人地址: JP Tokyo JP Kiyosu-shi
- 专利权人: TOKYO ELECTRON LIMITED,FUJIMI INCORPORATED
- 当前专利权人: TOKYO ELECTRON LIMITED,FUJIMI INCORPORATED
- 当前专利权人地址: JP Tokyo JP Kiyosu-shi
- 代理机构: Foley & Lardner LLP
- 优先权: JP2015-095517 20150508; JP2016-043941 20160307
- 主分类号: C04B35/505
- IPC分类号: C04B35/505 ; C23C4/12 ; C01F17/00 ; C23C4/04 ; C23C24/04 ; C23C4/129 ; C23C4/126 ; C23C4/134 ; C04B35/50 ; C04B35/553
摘要:
This invention provides a thermal spray material capable of forming a thermal spray coating excellent in plasma erosion resistance as well as in properties such as porosity and hardness. The thermal spray material comprises a rare earth element oxyhalide (RE-O—X) which comprises a rare earth element (RE), oxygen (O) and a halogen atom (X) as its elemental constituents. The rare earth element oxyhalide has a halogen to rare earth element molar ratio (X/RE) of 1.1 or greater.
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