Invention Grant
- Patent Title: Target image-capture device, extreme-ultraviolet-light generation device, and extreme-ultraviolet-light generation system
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Application No.: US15671691Application Date: 2017-08-08
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Publication No.: US10141186B2Publication Date: 2018-11-27
- Inventor: Hirokazu Hosoda , Takayuki Yabu , Hideo Hoshino
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Priority: WOPCT/JP2015/057502 20150313
- Main IPC: G03B27/52
- IPC: G03B27/52 ; H01L21/027 ; G03F7/20 ; H05G2/00

Abstract:
A target image-capture device may be configured to capture an image of a target that is made into plasma when irradiated with laser light and generates extreme-ultraviolet-light. The target image-capture device may include a droplet detector configured to detect passage of a droplet output as the target, and output a detection signal, an illumination light source, an image capturing element, a shutter device, and a controller configured to output, to the image capturing element, an exposure signal allowing the image capturing element to perform image capturing, and output, to the shutter device, a shutter open/close signal allowing a shutter to perform an open and close operation upon input of the detection signal. The controller may output the shutter open/close signal to the shutter device to make the shutter closed during when the droplet is irradiated with the laser light so that the plasma is generated.
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