- 专利标题: Method for producing crystal of silicon carbide, and crystal production device
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申请号: US15510038申请日: 2015-09-10
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公开(公告)号: US10151046B2公开(公告)日: 2018-12-11
- 发明人: Toru Ujihara , Shunta Harada , Daiki Koike , Tomonori Umezaki
- 申请人: National University Corporation Nagoya University , Central Glass Co., Ltd.
- 申请人地址: JP Nagoya-shi JP Ube-shi
- 专利权人: National University Corporation Nagoya University,Central Glass Co., Ltd.
- 当前专利权人: National University Corporation Nagoya University,Central Glass Co., Ltd.
- 当前专利权人地址: JP Nagoya-shi JP Ube-shi
- 代理机构: Crowell & Moring LLP
- 优先权: JP2014-184978 20140911
- 国际申请: PCT/JP2015/075711 WO 20150910
- 国际公布: WO2016/039415 WO 20160317
- 主分类号: C30B19/10
- IPC分类号: C30B19/10 ; C30B19/12 ; C30B29/36 ; C30B19/06 ; C23C14/06 ; H01L21/02 ; C30B9/06 ; C30B15/30
摘要:
Provided is a method that allows growing a single crystal of silicon carbide on an off-substrate of silicon carbide while suppressing surface roughening. The method for producing a crystal of silicon carbide includes rotating a seed crystal of silicon carbide while bringing the seed crystal into contact with a starting material solution containing silicon and carbon. A crystal growth surface of the seed crystal has an off-angle, and the position of a rotation center of the seed crystal lies downstream of the central position of the seed crystal in a step flow direction that is a formation direction of the off-angle.
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