Invention Grant
- Patent Title: Methods and apparatuses for directed self-assembly
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Application No.: US15517505Application Date: 2014-11-18
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Publication No.: US10151978B2Publication Date: 2018-12-11
- Inventor: XiaoMin Yang , Shuaigang Xiao , Kim Y. Lee , David S. Kuo
- Applicant: Seagate Technology LLC
- Applicant Address: US CA Cupertino
- Assignee: Seagate Technology LLC
- Current Assignee: Seagate Technology LLC
- Current Assignee Address: US CA Cupertino
- International Application: PCT/US2014/066228 WO 20141118
- International Announcement: WO2016/080972 WO 20160526
- Main IPC: G03F7/11
- IPC: G03F7/11 ; G03F7/40 ; H01L21/027 ; G03F7/16 ; C08L53/00 ; B81C1/00 ; G03F7/00 ; G03F7/09 ; G03F7/20

Abstract:
Provided herein is a method, including creating a first layer over a substrate, wherein the first layer is configured for directed self-assembly of a block copolymer thereover; creating a continuous second layer over the first layer by directed self-assembly of a block copolymer, wherein the second layer is also configured for directed self-assembly of a block copolymer thereover; and creating a third layer over the continuous second layer by directed self-assembly of a block copolymer. Also provided is an apparatus, comprising a continuous first layer comprising a thin film of a first, phase-separated block copolymer, wherein the first layer comprises a first chemoepitaxial template configured for directed self-assembly of a block copolymer thereon; and a second layer on the first layer, wherein the second layer comprises a thin film of a second, phase-separated block copolymer.
Public/Granted literature
- US20170307976A1 METHODS AND APPARATUSES FOR DIRECTED SELF-ASSEMBLY Public/Granted day:2017-10-26
Information query
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