- Patent Title: Microelectromechanical gas sensor based on knudsen thermal force
-
Application No.: US15183259Application Date: 2016-06-15
-
Publication No.: US10161818B2Publication Date: 2018-12-25
- Inventor: Alina Alexeenko , Andrew Strongrich
- Applicant: Purdue Research Foundation
- Applicant Address: US IN West Lafayette
- Assignee: PURDUE RESEARCH FOUNDATION
- Current Assignee: PURDUE RESEARCH FOUNDATION
- Current Assignee Address: US IN West Lafayette
- Agency: Purdue Research Foundation
- Main IPC: G01N7/00
- IPC: G01N7/00 ; G01N9/00 ; G01L9/00 ; G01N27/22

Abstract:
A system operating based on Knudsen thermal force includes a microelectromechanical (MEMS) gas sensor, the MEMS gas sensor includes a substrate. The sensor further includes at least one stationary assembly fixedly coupled to the substrate, the at least one stationary assembly terminating at corresponding pads configured to receive an electrical current for heating the at least one stationary assembly. Additionally, the sensor includes at least one moveable assembly disposed above the substrate and biased to move substantially according to a main axis and juxtaposed with the at least one stationary assembly.
Public/Granted literature
- US20160363553A1 MICROELECTROMECHANICAL GAS SENSOR BASED ON KNUDSEN THERMAL FORCE Public/Granted day:2016-12-15
Information query