Invention Grant
- Patent Title: Method for producing semiconductor package
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Application No.: US15449361Application Date: 2017-03-03
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Publication No.: US10163847B2Publication Date: 2018-12-25
- Inventor: Makoto Orikasa , Hideyuki Seike , Yuhei Horikawa , Hisayuki Abe
- Applicant: TDK CORPORATION
- Applicant Address: JP Tokyo
- Assignee: TDK CORPORATION
- Current Assignee: TDK CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L23/00 ; H01L25/00 ; H01L25/065

Abstract:
A method for producing a semiconductor package is a method for producing a semiconductor package in which a plurality of semiconductor chips, each of which includes a substrate, conductive portions formed on the substrate, and microbumps formed on the conductive portions, are laminated, which includes a heating process of causing a reducing gas to flow in an inert atmosphere into a space where the semiconductor chips are arranged and heated at or higher than a temperature of a melting point of the microbump, and in the heating process, a pressure application member is mounted on the microbump.
Public/Granted literature
- US20180254255A1 METHOD FOR PRODUCING SEMICONDUCTOR PACKAGE Public/Granted day:2018-09-06
Information query
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