Invention Grant
- Patent Title: Device with diffusion blocking layer in source/drain region
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Application No.: US15889367Application Date: 2018-02-06
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Publication No.: US10164099B2Publication Date: 2018-12-25
- Inventor: Shesh Mani Pandey , Pei Zhao , Baofu Zhu , Francis L. Benistant
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/08 ; H01L29/16 ; H01L29/165 ; H01L29/66

Abstract:
One illustrative device disclosed herein includes, among other things, a fin defined on a substrate. A gate electrode structure is positioned above the fin in a channel region. A source/drain region is defined in the fin. The source/drain region includes a first epitaxial semiconductor material. The first epitaxial semiconductor material includes a dopant species having a first concentration. A diffusion blocking layer is positioned above the first epitaxial semiconductor material. A second epitaxial semiconductor material is positioned above the diffusion blocking layer. The second epitaxial semiconductor material includes the dopant species having a second concentration greater than the first concentration.
Public/Granted literature
- US20180175198A1 DEVICE WITH DIFFUSION BLOCKING LAYER IN SOURCE/DRAIN REGION Public/Granted day:2018-06-21
Information query
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