- 专利标题: Image sensor device and method
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申请号: US15664588申请日: 2017-07-31
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公开(公告)号: US10164133B2公开(公告)日: 2018-12-25
- 发明人: Kuo-Chin Huang , Tzu-Jui Wang , Szu-Ying Chen , Dun-Nian Yaung , Jen-Cheng Liu , Bruce C.S. Chou , Jung-Kuo Tu , Cheng-Chieh Hsieh
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Slater Matsil, LLP
- 主分类号: H01L31/024
- IPC分类号: H01L31/024 ; H01L27/146 ; H01L31/02
摘要:
A system and method for blocking heat from reaching an image sensor in a three dimensional stack with a semiconductor device. In an embodiment a heat sink is formed in a back end of line process either on the semiconductor device or else on the image sensor itself when the image sensor is in a backside illuminated configuration. The heat sink may be a grid in either a single layer or in two layers, a zig-zag pattern, or in an interleaved fingers configuration.
公开/授权文献
- US20170330979A1 Image Sensor Device and Method 公开/授权日:2017-11-16
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