Invention Grant
- Patent Title: Manufacturing method of micro-electro-mechanical systems device
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Application No.: US15871083Application Date: 2018-01-15
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Publication No.: US10183856B2Publication Date: 2019-01-22
- Inventor: Hsin-Hung Huang , Wei-Yang Ou
- Applicant: SensorTek technology Corp.
- Applicant Address: TW Hsinchu County
- Assignee: SensorTek technology Corp.
- Current Assignee: SensorTek technology Corp.
- Current Assignee Address: TW Hsinchu County
- Agent Winston Hsu
- Main IPC: B81B3/00
- IPC: B81B3/00 ; C23C16/02 ; B81C1/00
Abstract:
A manufacturing method for a Micro-Electro-Mechanical Systems (MEMS) structure includes implementing a surface modification process, to form a transformation layer on the surfaces of the MEMS structure; implementing an anti-stiction coating pre-clean process, to clean the transformation layer on the surfaces towards a particular direction; and implementing an anti-stiction coating process, to coat a monolayer on the surfaces of the MEMS structure.
Public/Granted literature
- US20180201496A1 Manufacturing Method of Micro-Electro-Mechanical System Device Public/Granted day:2018-07-19
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