Invention Grant
- Patent Title: Transistor display panel and manufacturing method thereof
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Application No.: US15671638Application Date: 2017-08-08
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Publication No.: US10199405B2Publication Date: 2019-02-05
- Inventor: Joon-Hwa Bae , Byoung Kwon Choo , Byung Hoon Kang , Woo Jin Cho , Hyun Jin Cho , Jun Hyuk Cheon , Jee-Hyun Lee
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-si, Gyeonggi-do
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin-si, Gyeonggi-do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2016-0103303 20160812
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L21/02 ; H01L29/786 ; H01L21/306 ; H01L21/3105 ; H01L21/321 ; H01L29/66 ; H01L21/768

Abstract:
A method of manufacturing a transistor display panel and a transistor display panel, the method including forming a polycrystalline silicon layer on a substrate; forming an active layer by patterning the polycrystalline silicon layer; forming a first insulating layer covering the substrate and the active layer; exposing the active layer by polishing the first insulating layer using a polishing apparatus; and forming a second insulating layer that contacts the first insulating layer and the active layer, wherein exposing the active layer by polishing the first insulating layer includes coating a first slurry on a surface of the first insulating layer, the first slurry reducing a polishing rate of the active layer.
Public/Granted literature
- US20180047762A1 TRANSISTOR DISPLAY PANEL AND MANUFACTURING METHOD THEREOF Public/Granted day:2018-02-15
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