Invention Grant
- Patent Title: Systems for providing illumination in optical metrology
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Application No.: US15369560Application Date: 2016-12-05
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Publication No.: US10203247B2Publication Date: 2019-02-12
- Inventor: Gregory R. Brady , Andrei V. Shchegrov , Lawrence D. Rotter , Derrick A. Shaughnessy , Anatoly Shchemelinin , Ilya Bezel , Muzammil A. Arain , Anatoly A. Vasiliev , James Andrew Allen , Oleg Shulepov , Andrew V. Hill , Ohad Bachar , Moshe Markowitz , Yaron Ish-Shalom , Ilan Sela , Amnon Manassen , Alexander Svizher , Maxim Khokhlov , Avi Abramov , Oleg Tsibulevsky , Daniel Kandel , Mark Ghinovker
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz PC LLO
- Main IPC: H01J65/04
- IPC: H01J65/04 ; G01J3/02 ; G01J3/10 ; F21V13/08 ; F21V13/00 ; F21V13/12 ; G02B6/35 ; G02B6/293 ; G01J3/12
Abstract:
A system for providing illumination to a measurement head for optical metrology is configured to combine illumination beams from a plurality of illumination sources to deliver illumination at one or more selected wavelengths to the measurement head. The intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. Illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.
Public/Granted literature
- US20170146399A1 Systems for Providing Illumination in Optical Metrology Public/Granted day:2017-05-25
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