Invention Grant
- Patent Title: Anchor tracking apparatus for in-plane accelerometers and related methods
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Application No.: US15228229Application Date: 2016-08-04
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Publication No.: US10203352B2Publication Date: 2019-02-12
- Inventor: Xin Zhang , William A. Clark , Michael Judy
- Applicant: Analog Devices, Inc.
- Applicant Address: US MA Norwood
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Norwood
- Agency: Wolf, Greenfield & Sacks, P.C.
- Main IPC: G01P15/125
- IPC: G01P15/125 ; G01P15/18 ; G01P15/08

Abstract:
A microelectromechanical systems (MEMS) accelerometer is described. The MEMS accelerometer may comprise a proof mass configured to sense accelerations in a direction parallel the plane of the proof mass, and a plurality of compensation structures. The proof mass may be connected to one or more anchors through springs. The compensation structures may be coupled to the substrate of the MEMS accelerometer through a rigid connection to respective anchors. A compensation structure may comprise at least one compensation electrode forming one or more lateral compensation capacitors. The compensation capacitor(s) may be configured to sense displacement of the anchor to which the compensation structures is connected.
Public/Granted literature
- US20180038887A1 ANCHOR TRACKING APPARATUS FOR IN-PLANE ACCELEROMETERS AND RELATED METHODS Public/Granted day:2018-02-08
Information query
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