- Patent Title: Structure and formation method of semiconductor device structure
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Application No.: US14942639Application Date: 2015-11-16
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Publication No.: US10204985B2Publication Date: 2019-02-12
- Inventor: Tung-Ying Lee , Chih-Chieh Yeh , Chen-Feng Hsu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L21/306 ; H01L21/84 ; H01L27/12 ; H01L29/423 ; H01L29/66

Abstract:
Structures and formation methods of a semiconductor device structure are provided. The semiconductor device structure includes a first semiconductor layer and a second semiconductor layer vertically stacked over a semiconductor substrate. The first semiconductor layer and the second semiconductor layer include different materials. The semiconductor device structure also includes a gate stack covering a first portion of the first semiconductor layer. The semiconductor device structure further includes a spacer element over a sidewall of the gate stack. The spacer element covers the second semiconductor layer and a second portion of the first semiconductor layer. The thickness of the second semiconductor layer is different from the thickness of the second portion.
Public/Granted literature
- US20170141188A1 STRUCTURE AND FORMATION METHOD OF SEMICONDUCTOR DEVICE STRUCTURE Public/Granted day:2017-05-18
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