- Patent Title: Probe and object information acquisition apparatus using the same
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Application No.: US13795609Application Date: 2013-03-12
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Publication No.: US10209224B2Publication Date: 2019-02-19
- Inventor: Shinichiro Watanabe , Atsushi Kandori , Kazutoshi Torashima
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Venable LLP
- Priority: JP2012-083415 20120331
- Main IPC: G01D5/32
- IPC: G01D5/32 ; G01N29/00 ; G01N29/24 ; G01N21/17

Abstract:
A probe is provided in which penetration of an acoustic medium into a support layer of an optical reflection member through a pinhole or a scratch on an optical reflection layer is suppressed, occurrence of a solvent crack is suppressed, and noise due to photoacoustic waves that occurs on a receiving surface can be suppressed. The probe includes an element having at least one cell in which a vibration film containing one electrode out of two electrodes that are provided so as to interpose a space therebetween is vibratably supported. The probe further includes a support layer disposed on the vibration film, and an optical reflection layer disposed on the support layer. A protection layer against an acoustic medium is formed on the optical reflection layer.
Public/Granted literature
- US20130255389A1 PROBE AND OBJECT INFORMATION ACQUISITION APPARATUS USING THE SAME Public/Granted day:2013-10-03
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