公开(公告)号：US20210408096A1

公开(公告)日：2021-12-30

申请号：US17357437

申请日：2021-06-24

Applicant: CANON KABUSHIKI KAISHA

Inventor： Shinichiro Shimizu ,  Kazutoshi Torashima ,  Masahiro Kobayashi

IPC: H01L27/146 ,  B60R11/04

Abstract: A photoelectric conversion apparatus includes pixels having adjacent first and second pixels. The pixels each include, in a semiconductor layer of a substrate, a photoelectric conversion portion that generates charges, a charge holding portion that holds the charges, and a floating diffusion layer that converts the charges into a voltage. At least parts of the charge holding portion in the first pixel and the floating diffusion layer in the second pixel, parts of the charge holding portion in the first pixel and the charge holding portion in the second pixel, and/or parts of the floating diffusion layer in the first pixel and the floating diffusion layer in the second pixel overlap each other without physically touching each other in a depth direction of the substrate in a state where a region for separating the at least parts of the charge holding portions and the floating diffusion layers is provided therebetween.

公开(公告)号：US10209224B2

公开(公告)日：2019-02-19

申请号：US13795609

申请日：2013-03-12

Applicant: CANON KABUSHIKI KAISHA

Inventor： Shinichiro Watanabe ,  Atsushi Kandori ,  Kazutoshi Torashima

IPC: G01D5/32 ,  G01N29/00 ,  G01N29/24 ,  G01N21/17

Abstract: A probe is provided in which penetration of an acoustic medium into a support layer of an optical reflection member through a pinhole or a scratch on an optical reflection layer is suppressed, occurrence of a solvent crack is suppressed, and noise due to photoacoustic waves that occurs on a receiving surface can be suppressed. The probe includes an element having at least one cell in which a vibration film containing one electrode out of two electrodes that are provided so as to interpose a space therebetween is vibratably supported. The probe further includes a support layer disposed on the vibration film, and an optical reflection layer disposed on the support layer. A protection layer against an acoustic medium is formed on the optical reflection layer.

公开(公告)号：US10101303B2

公开(公告)日：2018-10-16

申请号：US14949482

申请日：2015-11-23

Applicant: CANON KABUSHIKI KAISHA

Inventor： Ayako Kato ,  Kazutoshi Torashima

IPC: G01N9/24 ,  G01N29/24 ,  B06B1/02

Abstract: A capacitive micromachined ultrasonic transducer includes a first insulating film and a second insulating film disposed with a gap therebetween, a first electrode and a second electrode disposed on outer surfaces of the first and second insulating films, respectively, with the gap therebetween, at least one cell having an electrostatic capacitance between the first and second electrodes that varies with a variation of a thickness of the gap caused by displacement of the second insulating film and the second electrode, and a voltage applying unit configured to apply a voltage to between the first electrode and the second electrode. An electric field strength applied to the first insulating film is closer to an electric field strength that causes dielectric breakdown than an electric field strength applied to the second insulating film.

公开(公告)号：US11081515B2

公开(公告)日：2021-08-03

申请号：US17018671

申请日：2020-09-11

Applicant: CANON KABUSHIKI KAISHA

Inventor： Takehiko Soda ,  Kazutoshi Torashima ,  Yasushi Nakata

IPC: H01L27/146 ,  H01L23/498

Abstract: A first conductive pattern and a third conductive pattern are joined to each other in a junction plane, and a second conductive pattern and a fourth conductive pattern are joined to each other in the junction plane, and an insulation layer is arranged at least in one of spaces between the first conductive pattern and the second conductive pattern and between the third conductive pattern and the fourth conductive pattern.

公开(公告)号：US20170307438A1

公开(公告)日：2017-10-26

申请号：US15645518

申请日：2017-07-10

Applicant: CANON KABUSHIKI KAISHA

Inventor： Takahiro Akiyama ,  Kazutoshi Torashima

IPC: G01H9/00 ,  G01H11/06 ,  B06B1/02

CPC classification number: G01H9/008 ,  B06B1/0292 ,  G01H11/06

Abstract: A capacitance type transducer includes a plurality of cells each having a structure in which a vibrating film is supposed so as to be vibrated. The vibrating film includes: a second electrode formed so that a gap is interposed between the second electrode and a first electrode; and an insulating film formed on the second electrode. The capacitance transducer manufacturing method includes: forming a sacrificial layer on the first electrode; forming a layer including a vibrating film on the sacrificial layer; forming an etching hole to remove the sacrificial layer; and forming a sealing film for sealing the etching hole. Before forming the etching hole to remove the sacrificial layer, a through hole is formed in an insulating film on the second electrode, and a conductor film is formed on the insulating film having the through hole to electrically connect a conductor in the through hole and the second electrode.

公开(公告)号：US20170258448A1

公开(公告)日：2017-09-14

申请号：US15450529

申请日：2017-03-06

Applicant: CANON KABUSHIKI KAISHA

Inventor： Ayako Maruyama ,  Kazutoshi Torashima ,  Atsushi Kandori

IPC: A61B8/00 ,  A61B8/08 ,  A61B5/00

CPC classification number: A61B8/4494 ,  A61B5/004 ,  A61B5/0095 ,  A61B5/4312 ,  A61B5/708 ,  A61B8/4477 ,  A61B8/4483 ,  A61B8/5207 ,  A61B8/58 ,  B06B1/0246 ,  B06B1/0292 ,  B06B1/0607 ,  B06B1/0622 ,  B06B1/0688 ,  B06B2201/51 ,  B06B2201/56 ,  G01S7/52046 ,  G01S7/52079 ,  G01S15/8929

Abstract: The technology concerning improvement of resolution of an acoustic wave sensor having a hemispherical shape or the like is provided. An ultrasonic transducer unit includes an ultrasonic transducer having a plurality of ultrasonic transducer elements, and a probe casing configured to support a plurality of the ultrasonic transducers, and to have a concave portion facing a subject. The plurality of ultrasonic transducer elements is arranged on a same plane facing a center of curvature of the probe casing. The plurality of ultrasonic transducer elements is arranged in a rotationally symmetrical manner about a normal line connecting the center of curvature of the probe casing to a point on a plane of the ultrasonic transducer.

公开(公告)号：US20160153939A1

公开(公告)日：2016-06-02

申请号：US14949482

申请日：2015-11-23

Applicant: CANON KABUSHIKI KAISHA

Inventor： Ayako Kato ,  Kazutoshi Torashima

IPC: G01N29/24 ,  B06B1/02

CPC classification number: G01N29/2406 ,  B06B1/0292

Abstract: A capacitive micromachined ultrasonic transducer includes a first insulating film and a second insulating film disposed with a gap therebetween, a first electrode and a second electrode disposed on outer surfaces of the first and second insulating films, respectively, with the gap therebetween, at least one cell having an electrostatic capacitance between the first and second electrodes that varies with a variation of a thickness of the gap caused by displacement of the second insulating film and the second electrode, and a voltage applying unit configured to apply a voltage to between the first electrode and the second electrode. An electric field strength applied to the first insulating film is closer to an electric field strength that causes dielectric breakdown than an electric field strength applied to the second insulating film.

Abstract translation: 一种电容式微加工超声波换能器包括第一绝缘膜和设置在其间的间隔的第二绝缘膜，分别设置在第一和第二绝缘膜的外表面上的第一电极和第二电极，其间具有间隙，至少一个 所述第一电极和第二电极之间的静电电容随着由所述第二绝缘膜和所述第二电极的位移引起的所述间隙的厚度的变化而变化;电压施加单元，被配置为施加电压到所述第一电极 和第二电极。 施加到第一绝缘膜的电场强度比施加到第二绝缘膜的电场强度更接近导致电介质击穿的电场强度。

公开(公告)号：US20150107360A1

公开(公告)日：2015-04-23

申请号：US14511365

申请日：2014-10-10

Applicant: CANON KABUSHIKI KAISHA

Inventor： Takahiro Akiyama ,  Kazutoshi Torashima

IPC: G01D5/24 ,  G01H9/00

CPC classification number: G01H9/008 ,  B06B1/0292 ,  G01H11/06

Abstract: A capacitance type transducer includes a plurality of cells each having a structure in which a vibrating film is supposed so as to be vibrated. The vibrating film includes: a second electrode formed so that a gap is interposed between the second electrode and a first electrode; and an insulating film formed on the second electrode. The capacitance transducer manufacturing method includes: forming a sacrificial layer on the first electrode; forming a layer including a vibrating film on the sacrificial layer; forming an etching hole to remove the sacrificial layer; and forming a sealing film for sealing the etching hole. Before forming the etching hole to remove the sacrificial layer, a through hole is formed in an insulating film on the second electrode, and a conductor film is formed on the insulating film having the through hole to electrically connect a conductor in the through hole and the second electrode.

Abstract translation: 电容式换能器包括多个单元，每个单元具有振动膜被振动的结构。 振动膜包括：第二电极，其形成为使得间隙插入在第二电极和第一电极之间; 以及形成在第二电极上的绝缘膜。 电容换能器的制造方法包括：在第一电极上形成牺牲层; 在所述牺牲层上形成包括振动膜的层; 形成蚀刻孔以去除牺牲层; 并形成用于密封蚀刻孔的密封膜。 在形成蚀刻孔以去除牺牲层之前，在第二电极上的绝缘膜中形成通孔，并且在具有通孔的绝缘膜上形成导体膜，以将通孔中的导体和 第二电极。

公开(公告)号：US20140318255A1

公开(公告)日：2014-10-30

申请号：US14251743

申请日：2014-04-14

Applicant: CANON KABUSHIKI KAISHA

Inventor： Kazutoshi Torashima ,  Kenichi Nagae

IPC: B06B1/02 ,  G01N29/24 ,  G01N29/34

CPC classification number: B06B1/0292 ,  G01N29/2406 ,  G01N29/2418 ,  G01N29/34 ,  G01N2291/045 ,  G01N2291/101 ,  Y10T29/49007

Abstract: Provided is a capacitive transducer including an element including a plurality of cells supported such that a vibrating membrane including one of a pair of electrodes formed with an gap inbetween is capable of vibration, wherein a distance between a pair of electrodes of a cell in an end portion of the element is greater than a distance between a pair of electrodes of a cell in a middle portion of the element.

Abstract translation: 提供了一种电容换能器，其包括：多个单元的元件，所述多个单元被支撑，使得包括在其间形成有间隙的一对电极中的一个电极的振动膜能够振动，其中在一端的电池的一对电极之间的距离 元件的部分大于元件的中间部分中的电池的一对电极之间的距离。

公开(公告)号：US20140313861A1

公开(公告)日：2014-10-23

申请号：US14254270

申请日：2014-04-16

Applicant: CANON KABUSHIKI KAISHA

Inventor： Kazutoshi Torashima ,  Ayako Kato ,  Takahiro Akiyama

IPC: H04R19/00 ,  H04R31/00

CPC classification number: H04R19/00 ,  B06B1/0292 ,  B06B2201/20 ,  H04R31/00

Abstract: A transducer includes at least one element including a plurality of cells. Each of the cells includes a pair of electrodes disposed with a gap therebetween and a vibrating membrane including one of the electrodes, and the vibrating membrane is vibratably supported. First and second cells of the plurality of cells in the element have the gaps that communicate with each other, and the first cell and a third cell in the element have the gaps that do not communicate with each other.

Abstract translation: 换能器包括至少一个包括多个单元的元件。 每个电池包括一对电极，它们之间具有间隙，并且包括一个电极的振动膜，振动膜被可振动地支撑。 元件中的多个单元的第一和第二单元具有彼此通信的间隙，并且元件中的第一单元和第三单元具有彼此不连通的间隙。