Invention Grant
- Patent Title: Chuck table and substrate processing system including the same
-
Application No.: US15215578Application Date: 2016-07-20
-
Publication No.: US10211084B2Publication Date: 2019-02-19
- Inventor: Doojin Kim , Youngsik Kim , Kunho Song , Yongdae Ha
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Renaissance IP Law Group LLP
- Priority: KR10-2015-0109517 20150803
- Main IPC: B24B27/00
- IPC: B24B27/00 ; H01L21/683 ; B24B37/10 ; B24B37/30 ; B24B37/34 ; H01L21/687 ; B25B11/00
Abstract:
A chuck table is provided and a substrate processing system including the same. The chuck table includes a base disk having a first vacuum hole, and a chuck disk disposed on the first vacuum hole. The chuck disk includes a plurality of first sectors and a first connection member connecting the first sectors to each other.
Public/Granted literature
- US20170040202A1 CHUCK TABLE AND SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME Public/Granted day:2017-02-09
Information query
