Invention Grant
- Patent Title: Separation method, display device, display module, and electronic device
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Application No.: US15666758Application Date: 2017-08-02
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Publication No.: US10211239B2Publication Date: 2019-02-19
- Inventor: Shunpei Yamazaki , Seiji Yasumoto , Yuka Kobayashi , Satoru Idojiri
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Applicant Address: JP Atsugi-shi, Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi-shi, Kanagawa-ken
- Agency: Fish & Richardson P.C.
- Priority: JP2016-154489 20160805
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L21/02 ; H01L21/47 ; H01L21/683 ; H01L29/66 ; H01L29/786 ; G02F1/1333 ; G02F1/1335 ; G02F1/1362 ; G02F1/1368 ; H01L27/32 ; G02F1/136
Abstract:
To increase the yield of the separation process. To produce display devices formed through the separation process with higher mass productivity. A first layer is formed using a material including a resin or a resin precursor over a substrate. Then, first heat treatment is performed on the first layer, whereby a first resin layer including a residue of an oxydiphthalic acid is formed. Then, a layer to be separated is formed over the first resin layer. Then, the layer to be separated and the substrate are separated from each other. The first heat treatment is performed in an atmosphere containing oxygen.
Public/Granted literature
- US20180040647A1 SEPARATION METHOD, DISPLAY DEVICE, DISPLAY MODULE, AND ELECTRONIC DEVICE Public/Granted day:2018-02-08
Information query
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