Invention Grant
- Patent Title: Ferroelectric memory device and fabrication method thereof
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Application No.: US15230289Application Date: 2016-08-05
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Publication No.: US10211312B2Publication Date: 2019-02-19
- Inventor: Jan Van Houdt , Voon Yew Thean
- Applicant: IMEC VZW
- Applicant Address: BE Leuven
- Assignee: IMEC vzw
- Current Assignee: IMEC vzw
- Current Assignee Address: BE Leuven
- Agency: Knobbe, Martens, Olson & Bear LLP
- Priority: EP15180192 20150807
- Main IPC: H01L29/51
- IPC: H01L29/51 ; H01L29/78 ; H01L29/66 ; H01L21/28 ; H01L21/02

Abstract:
The disclosed technology generally relates to semiconductor devices, and more particularly to a non-volatile ferroelectric memory device and to methods of fabricating the same. In one aspect, a non-volatile memory device includes a high dielectric constant layer (high-k) layer or a metal layer on a semiconductor substrate. The non-volatile memory device additionally includes a two-dimensional (2D) semiconductor channel layer interposed between the high-k layer or metal layer and a ferroelectric layer. The non-volatile memory device additionally includes a metal gate layer on the ferroelectric layer, and further includes a source region and a drain region each electrically coupled to the 2D semiconductor channel layer.
Public/Granted literature
- US20170040331A1 FERROELECTRIC MEMORY DEVICE AND FABRICATION METHOD THEREOF Public/Granted day:2017-02-09
Information query
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