- 专利标题: Semiconductor device
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申请号: US15034286申请日: 2014-10-22
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公开(公告)号: US10211337B2公开(公告)日: 2019-02-19
- 发明人: Shinichirou Wada
- 申请人: Hitachi Automotive Systems, Ltd.
- 申请人地址: JP Hitachinaka-shi
- 专利权人: Hitachi Automotive Systems, Ltd.
- 当前专利权人: Hitachi Automotive Systems, Ltd.
- 当前专利权人地址: JP Hitachinaka-shi
- 代理机构: Crowell & Moring LLP
- 优先权: JP2013-233622 20131112
- 国际申请: PCT/JP2014/078012 WO 20141022
- 国际公布: WO2015/072295 WO 20150521
- 主分类号: H01L29/78
- IPC分类号: H01L29/78 ; H01L21/76 ; H01L29/861 ; H01L29/868 ; H01L27/12 ; H01L29/06 ; H01L29/786 ; H01L29/08 ; H01L29/10 ; H01L29/40
摘要:
To provide a high-withstand-voltage lateral semiconductor device in which ON-resistance or drain current density is uniform at an end portion and a center portion of the device in a gate width direction. A lateral N-type MOS transistor 11 formed on an SOI substrate includes a trench isolation structure 10b filled with an insulating film at an end portion of the transistor. An anode region 6 of a diode 12 is provided adjacent to a P-type body region 1 of the transistor through the trench isolation structure 10b and a cathode region 15 of the diode 12 is also provided adjacent to an N-type drain-drift region 4 of the transistor through the trench isolation structure 10b so as to cause electric field to be applied to the trench isolation structure 10b to be zero when a voltage is applied across the transistor.
公开/授权文献
- US20160276477A1 Semiconductor Device 公开/授权日:2016-09-22
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