- 专利标题: Optical element module with minimized parasitic loads
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申请号: US13690227申请日: 2012-11-30
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公开(公告)号: US10215948B2公开(公告)日: 2019-02-26
- 发明人: Jens Kugler , Ulrich Weber , Dirk Schaffer
- 申请人: Carl Zeiss SMT GmbH
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss SMT GmbH
- 当前专利权人: Carl Zeiss SMT GmbH
- 当前专利权人地址: DE Oberkochen
- 代理机构: Fish & Richardson P.C.
- 主分类号: G02B7/02
- IPC分类号: G02B7/02 ; G03F7/20
摘要:
An optical element module includes an optical element unit and a support structure. The optical element module includes an optical element. The support structure includes a support device and a contact device connected to the support device. A surface of the contact device contacts a surface of the optical element unit and exerts a holding force on the optical element unit along a holding force direction.
公开/授权文献
- US20130100547A1 OPTICAL ELEMENT MODULE WITH MINIMIZED PARASITIC LOADS 公开/授权日:2013-04-25
信息查询
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B7/00 | 光学元件的安装、调整装置或不漏光连接 |
G02B7/02 | .用于透镜 |