- 专利标题: Immersion lithographic apparatus
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申请号: US14911452申请日: 2014-07-22
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公开(公告)号: US10216095B2公开(公告)日: 2019-02-26
- 发明人: Michel Riepen , Christianus Wilhelmus Johannes Berendsen , Anton Alexander Darhuber , Hubertus Mattheus Joseph Maria Wedershoven , Josephus Catharina Henricus Zeegers
- 申请人: ASML Netherlands B.V.
- 申请人地址: NL Veldhoven
- 专利权人: ASML NETHERLANDS B.V.
- 当前专利权人: ASML NETHERLANDS B.V.
- 当前专利权人地址: NL Veldhoven
- 代理机构: Pillsbury Winthrop Shaw Pittman, LLP
- 优先权: EP13182414 20130830
- 国际申请: PCT/EP2014/065699 WO 20140722
- 国际公布: WO2015/028202 WO 20150305
- 主分类号: G03B27/42
- IPC分类号: G03B27/42 ; G03B27/52 ; G03F7/20
摘要:
An immersion lithographic apparatus is configured to subject a photosensitive layer on a substrate to a patterned beam of radiation via a liquid. The immersion lithographic apparatus includes a moveable object having a surface, a fluid handling system to control a presence of the liquid in a volume restricted by the surface, the fluid handling system, and a free surface of the liquid, the free surface extending between the surface and the fluid handling system; and a heating system configured to locally heat a portion of the liquid at a receding side of a periphery edge of the volume in contact with the surface, where the object is receding from the volume along a direction of movement of the object relative to the fluid handling system.
公开/授权文献
- US20160195821A1 IMMERSION LITHOGRAPHIC APPARATUS 公开/授权日:2016-07-07
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