Invention Grant
- Patent Title: Immersion lithographic apparatus
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Application No.: US14911452Application Date: 2014-07-22
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Publication No.: US10216095B2Publication Date: 2019-02-26
- Inventor: Michel Riepen , Christianus Wilhelmus Johannes Berendsen , Anton Alexander Darhuber , Hubertus Mattheus Joseph Maria Wedershoven , Josephus Catharina Henricus Zeegers
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman, LLP
- Priority: EP13182414 20130830
- International Application: PCT/EP2014/065699 WO 20140722
- International Announcement: WO2015/028202 WO 20150305
- Main IPC: G03B27/42
- IPC: G03B27/42 ; G03B27/52 ; G03F7/20

Abstract:
An immersion lithographic apparatus is configured to subject a photosensitive layer on a substrate to a patterned beam of radiation via a liquid. The immersion lithographic apparatus includes a moveable object having a surface, a fluid handling system to control a presence of the liquid in a volume restricted by the surface, the fluid handling system, and a free surface of the liquid, the free surface extending between the surface and the fluid handling system; and a heating system configured to locally heat a portion of the liquid at a receding side of a periphery edge of the volume in contact with the surface, where the object is receding from the volume along a direction of movement of the object relative to the fluid handling system.
Public/Granted literature
- US20160195821A1 IMMERSION LITHOGRAPHIC APPARATUS Public/Granted day:2016-07-07
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