Invention Grant
- Patent Title: Apparatus and method for exchanging probe
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Application No.: US15286626Application Date: 2016-10-06
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Publication No.: US10222414B2Publication Date: 2019-03-05
- Inventor: Jae Wan Hong , Jeong Hoi Kim , Yu Sin Yang , Sang Kil Lee , Chung Sam Jun
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si, Gyeonggi-Do KR Seoul
- Assignee: SAMSUNG ELECTRONICS CO., LTD.,NANOFOCUS INC.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.,NANOFOCUS INC.
- Current Assignee Address: KR Suwon-si, Gyeonggi-Do KR Seoul
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2015-0173123 20151207
- Main IPC: G01R31/28
- IPC: G01R31/28 ; G01R1/04

Abstract:
An apparatus for exchanging a probe includes a stacker configured to receive a probe and to align the probe, a probe connector connected to the probe, and a laser alignment unit including a light emitter and a light receiver. The light emitter is configured to emit a laser beam to the probe, and the light receiver is configured to detect the laser beam reflected by the probe. The laser alignment unit is configured to detect when the probe is properly aligned on the probe connector using the light receiver, and the laser alignment unit is configured to stop moving the stacker when it is detected that the probe is properly aligned.
Public/Granted literature
- US20170160341A1 APPARATUS AND METHOD FOR EXCHANGING PROBE Public/Granted day:2017-06-08
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