Invention Grant
- Patent Title: Microelectromechanical microphone
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Application No.: US15143207Application Date: 2016-04-29
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Publication No.: US10225635B2Publication Date: 2019-03-05
- Inventor: Roberto Brioschi , Alex Gritti , Kevin Formosa , Paul Anthony Barbara
- Applicant: STMICROELECTRONICS S.R.L. , STMICROELECTRONICS (MALTA) LTD
- Applicant Address: IT Agrate Brianza MT Kirkop
- Assignee: STMicroelectronics S.r.l.,STMicroelectronics (Malta) Ltd
- Current Assignee: STMicroelectronics S.r.l.,STMicroelectronics (Malta) Ltd
- Current Assignee Address: IT Agrate Brianza MT Kirkop
- Agency: Seed Intellectual Property Law Group LLP
- Priority: IT102015000029270 20150630; IT102015000056964 20150930; IT102015000084541 20151217
- Main IPC: H01L27/14
- IPC: H01L27/14 ; H04R1/04 ; B81B7/00 ; H04R19/00 ; H04R19/04 ; H04R1/06 ; H04R31/00

Abstract:
A microelectromechanical microphone includes: a substrate; a sensor chip, integrating a microelectromechanical electroacoustic transducer; and a control chip operatively coupled to the sensor chip. In one embodiment, the sensor chip and the control chip are bonded to the substrate, and the sensor chip overlies, or at least partially overlies, the control chip. In another embodiment, the sensor is bonded to the substrate and a barrier is located around at least a portion of the sensor chip.
Public/Granted literature
- US20170006368A1 MICROELECTROMECHANICAL MICROPHONE Public/Granted day:2017-01-05
Information query
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