Invention Grant
- Patent Title: Semiconductor memory devices including protrusion pads
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Application No.: US15652648Application Date: 2017-07-18
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Publication No.: US10229929B2Publication Date: 2019-03-12
- Inventor: Kwang-Soo Kim , Se Mee Jang
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel, P.A.
- Priority: KR10-2016-0167935 20161209
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11565 ; H01L27/11575 ; H01L27/1157 ; H01L23/535

Abstract:
Disclosed is a semiconductor memory device may include a substrate including a cell array region and a contact region and a stacking structure including a plurality of insulating layers and a plurality of gate electrodes alternately stacked on the substrate. The stacking structure may include a stepwise structure in the contact region. Ones of the plurality of gate electrodes may include a respective pad unit that comprises a step of the stepwise structure. At least one of the pad units may include a base pad and a protrusion pad on the base pad. The protrusion pad may be between and spaced apart from two edges of a surface of the base pad that are perpendicular to an extension direction of the respective gate electrode.
Public/Granted literature
- US20180166462A1 Semiconductor Memory Devices Including Protrusion Pads Public/Granted day:2018-06-14
Information query
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