Invention Grant
- Patent Title: Indium-rich NMOS transistor channels
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Application No.: US15576381Application Date: 2015-06-23
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Publication No.: US10229997B2Publication Date: 2019-03-12
- Inventor: Chandra S. Mohapatra , Anand S. Murthy , Glenn A. Glass , Tahir Ghani , Willy Rachmady , Jack T. Kavalieros , Gilbert Dewey , Matthew V. Metz , Harold W. Kennel
- Applicant: INTEL CORPORATION
- Applicant Address: US CA Santa Clara
- Assignee: INTEL CORPORATION
- Current Assignee: INTEL CORPORATION
- Current Assignee Address: US CA Santa Clara
- Agency: Finch & Maloney PLLC
- International Application: PCT/US2015/037141 WO 20150623
- International Announcement: WO2016/209210 WO 20161229
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L29/10 ; H01L29/775 ; H01L29/12 ; H01L27/088 ; H01L29/205 ; H01L21/02

Abstract:
Techniques are disclosed for forming high mobility NMOS fin-based transistors having an indium-rich channel region electrically isolated from the sub-fin by an aluminum-containing layer. The aluminum aluminum-containing layer may be provisioned within an indium-containing layer that includes the indium-rich channel region, or may be provisioned between the indium-containing layer and the sub-fin. The indium concentration of the indium-containing layer may be graded from an indium-poor concentration near the aluminum-containing barrier layer to an indium-rich concentration at the indium-rich channel layer. The indium-rich channel layer is at or otherwise proximate to the top of the fin, according to some example embodiments. The grading can be intentional and/or due to the effect of reorganization of atoms at the interface of indium-rich channel layer and the aluminum-containing barrier layer. Numerous variations and embodiments will be appreciated in light of this disclosure.
Public/Granted literature
- US20180158944A1 INDIUM-RICH NMOS TRANSISTOR CHANNELS Public/Granted day:2018-06-07
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