Invention Grant
- Patent Title: Vertical-transport transistors with self-aligned contacts
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Application No.: US15671605Application Date: 2017-08-08
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Publication No.: US10230000B2Publication Date: 2019-03-12
- Inventor: Emilie Bourjot , Daniel Chanemougame , Tek Po Rinus Lee , Ruilong Xie , Hui Zang
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Thompson Hine LLP
- Agent Anthony Canale
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L29/66 ; H01L29/423

Abstract:
Methods and structures that include a vertical-transport field-effect transistor. A semiconductor fin is formed that projects from a first source/drain region. A second source/drain region is spaced vertically along the semiconductor fin from the first source/drain region. A gate stack is arranged between the second source/drain region and the first source/drain region. A spacer is formed adjacent to a sidewall of the second source/drain region. A first contact is connected with a top surface of the second source/drain region, a second contact is connected with a top surface of the first source/drain region, and a third contact is connected with a top surface of the gate stack. The spacer is arranged between the second source/drain region and the second contact or between the second source/drain region and the third contact.
Public/Granted literature
- US20190051757A1 VERTICAL-TRANSPORT TRANSISTORS WITH SELF-ALIGNED CONTACTS Public/Granted day:2019-02-14
Information query
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