Invention Grant
- Patent Title: Demagnetization of magnetic media by C doping for HDD patterned media application
-
Application No.: US15193307Application Date: 2016-06-27
-
Publication No.: US10233538B2Publication Date: 2019-03-19
- Inventor: Martin A. Hilkene , Roman Gouk , Matthew D. Scotney-Castle , Peter I. Porshnev
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: C23C14/58
- IPC: C23C14/58 ; C23C14/48 ; C23C14/04 ; C23C14/06 ; G11B5/62 ; G11B5/85 ; G11B5/851 ; G11B5/858

Abstract:
Embodiments described herein provide methods and apparatus for treating a magnetic substrate having an imprinted, oxygen-reactive mask formed thereon by implanting ions into a magnetically active surface of the magnetic substrate through the imprinted oxygen-reactive mask, wherein the ions do not reduce the oxygen reactivity of the mask, and removing the mask by exposing the substrate to an oxygen-containing plasma. The mask may be amorphous carbon, through which carbon-containing ions are implanted into the magnetically active surface. The carbon-containing ions, which may also contain hydrogen, may be formed by activating a mixture of hydrocarbon gas and hydrogen. A ratio of the hydrogen and the hydrocarbon gas may be selected or adjusted to control the ion implantation.
Public/Granted literature
- US20160305013A1 DEMAGNETIZATION OF MAGNETIC MEDIA BY C DOPING FOR HDD PATTERNED MEDIA APPLICATION Public/Granted day:2016-10-20
Information query
IPC分类: