公开(公告)号：US20220157571A1

公开(公告)日：2022-05-19

申请号：US17592350

申请日：2022-02-03

申请人： Western Digital Technologies, Inc.

发明人： Cherngye Hwang ,  Reimar Azupardo ,  Randall Simmons ,  Mary Agnes Gupit Perez

IPC分类号： H01J37/32 ,  C23C14/06 ,  C23C14/54 ,  C23C14/32 ,  G11B5/85

摘要： Cathode structures are disclosed for use with pulsed cathodic arc deposition systems for forming diamond-like carbon (DLC) films on devices, such as on the sliders of hard disk drives. In illustrative examples, a base layer composed of an electrically- and thermally-conducting material is provided between the ceramic substrate of the cathode and a graphitic paint outer coating, where the base layer is a silver-filled coating that adheres to the ceramic rod and the graphitic paint. The base layer is provided, in some examples, to achieve and maintain a relatively low resistance (and hence a relatively high conductivity) within the cathode structure during pulsed arc deposition to avoid issues that can result from a loss of conductivity within the graphitic paint over time as deposition proceeds. Examples of suitable base material compounds are described herein where, e.g., the base layer can withstand temperatures of 1700° F. (927° C.).

公开(公告)号：US20210090774A1

公开(公告)日：2021-03-25

申请号：US16990107

申请日：2020-08-11

申请人： Seagate Technology LLC

发明人： Sarbeswar Sahoo ,  Meng Zhu ,  Michael C. Kautzky ,  Gregory Girolami ,  John Abelson ,  Pengyi Zhang ,  Shaista Babar

IPC分类号： H01F10/14 ,  G11B5/73 ,  H01F10/16 ,  H01F41/22 ,  G11B5/65 ,  G11B5/84 ,  G11B5/85

摘要： Methods of forming a layer of magnetic material on a substrate, the method including: configuring a substrate in a chamber; controlling the temperature of the substrate at a substrate temperature, the substrate temperature being at or below about 250° C.; and introducing one or more precursors into the chamber, the one or more precursors including: cobalt (Co), nickel (Ni), iron (Fe), or combinations thereof, wherein the precursors chemically decompose at the substrate temperature, and wherein a layer of magnetic material is formed on the substrate, the magnetic material including at least a portion of the one or more precursors, and the magnetic material having a magnetic flux density of at least about 1 Tesla (T).

公开(公告)号：US10217482B2

公开(公告)日：2019-02-26

申请号：US15606040

申请日：2017-05-26

申请人： SEAGATE TECHNOLOGY LLC

发明人： Vijay Karthik Sankar ,  Tong Zhao ,  Yongjun Zhao ,  Michael C. Kautzky ,  Hui Brickner ,  Sarbeswar Sahoo

IPC分类号： G11B5/40 ,  G11B5/31 ,  G11B5/60 ,  G11B7/24059 ,  G11B5/84 ,  G11B5/48 ,  B05B1/36 ,  G11B5/85 ,  G11B5/00

摘要： Devices that include a near field transducer (NFT), the NFT having a disc and a peg, and the peg having five surfaces thereof; and at least one adhesion layer positioned on at least one of the five surfaces of the peg, the adhesion layer including one or more of the following: yttrium (Y), tin (Sn), iron (Fe), copper (Cu), carbon (C), holmium (Ho), gallium (Ga), silver (Ag), ytterbium (Yb), chromium (Cr), tantalum (Ta), iridium (Ir), zirconium (Zr), yttrium (Y), scandium (Sc), cobalt (Co), silicon (Si), nickel (Ni), molybdenum (Mo), niobium (Nb), palladium (Pd), titanium (Ti), rhenium (Re), osmium (Os), platinum (Pt), aluminum (Al), ruthenium (Ru), rhodium (Rh), vanadium (V), germanium (Ge), tin (Sn), magnesium (Mg), iron (Fe), copper (Cu), tungsten (W), hafnium (Hf), carbon (C), boron (B), holmium (Ho), antimony (Sb), gallium (Ga), manganese (Mn), silver (Ag), indium (In), bismuth (Bi), zinc (Zn), ytterbium (Yb), and combinations thereof.

公开(公告)号：US20180066362A1

公开(公告)日：2018-03-08

申请号：US15684030

申请日：2017-08-23

申请人： SUMITOMO METAL MINING CO., LTD.

发明人： Hideharu Okami

IPC分类号： C23C16/455 ,  C23C14/56 ,  C23C14/02 ,  G11B5/85

CPC分类号： C23C16/45534 ,  B65H2301/51145 ,  C23C14/021 ,  C23C14/025 ,  C23C14/165 ,  C23C14/205 ,  C23C14/35 ,  C23C14/562 ,  C23C14/568 ,  G11B5/85 ,  H01J37/3277

摘要： A treatment apparatus includes two can rolls provided on a transfer path through which a long resin film is transferred in a roll-to-roll manner in a vacuum chamber; and surface treatment means facing an outer circumference of each of the can rolls to treat a surface of the long resin film cooled by being wound around the outer circumference. The downstream can roll is provided with upper and lower two sets of feeding and sending systems, and one surface of the long resin film in contact with the outer circumference of the downstream can roll at a time when the long resin film travels through the lower one of the two sets of feeding and sending systems is opposite to the other surface of the resin film in contact with the outer circumference of the downstream can roll at a time when the resin film travels through the upper one.

公开(公告)号：US20170206922A1

公开(公告)日：2017-07-20

申请号：US15474851

申请日：2017-03-30

申请人： Applied Materials, Inc.

发明人： Christopher Dennis BENCHER ,  Roman GOUK ,  Steven VERHAVERBEKE ,  Li-Qun XIA ,  Yong-Won LEE ,  Matthew D. SCOTNEY-CASTLE ,  Martin A. HILKENE ,  Peter I. PORSHNEV

IPC分类号： G11B5/85 ,  G11B5/74

CPC分类号： G11B5/85 ,  G11B5/743 ,  G11B5/855

摘要： A method and apparatus for forming magnetic media substrates is provided. A patterned resist layer is formed on a substrate having a magnetically susceptible layer. A conformal protective layer is formed over the patterned resist layer to prevent degradation of the pattern during subsequent processing. The substrate is subjected to an energy treatment wherein energetic species penetrate portions of the patterned resist and conformal protective layer according to the pattern formed in the patterned resist, impacting the magnetically susceptible layer and modifying a magnetic property thereof. The patterned resist and conformal protective layers are then removed, leaving a magnetic substrate having a pattern of magnetic properties with a topography that is substantially unchanged.

公开(公告)号：US20140079877A1

公开(公告)日：2014-03-20

申请号：US14017387

申请日：2013-09-04

申请人： SHOWA DENKO K.K.

发明人： Yasuyuki Tsutatani ,  Daisuke Shiomi ,  Satoru Ueno ,  Ichiro Ota ,  Takehiko Okabe

IPC分类号： G11B5/85

CPC分类号： G11B5/85 ,  C23C14/564 ,  G11B5/8408

摘要： A method of fabricating a magnetic recording medium sequentially forms a magnetic recording layer, a protection layer, and a lubricant layer on a stacked body. The lubricant layer is formed by vapor-phase lubrication without exposing the stacked body to atmosphere after forming the protection layer on the stacked body. A region having a gas pressure P3 is provided in a transport path of the stacked body after the formation of the protection layer and before the formation of the lubricant layer, satisfying relationships P3>P1 and P3>P2, where P1 denotes a process gas pressure at a time of forming the protection layer, and P2 denotes a process gas pressure at a time of forming the lubricant layer.

摘要翻译： 制造磁记录介质的方法在层叠体上依次形成磁记录层，保护层和润滑层。 通过气相润滑形成润滑剂层，而不在层叠体上形成保护层后将层叠体暴露在大气中。 具有气体压力P3的区域在形成保护层之后并在形成润滑剂层之前设置在堆叠体的输送路径中，满足关系P3> P1和P3> P2，其中P1表示处理气体压力 在形成保护层时，P2表示形成润滑剂层时的工艺气体压力。

公开(公告)号：US20130213302A1

公开(公告)日：2013-08-22

申请号：US13858386

申请日：2013-04-08

申请人： Fuji Electric Co., Ltd.

发明人： Katsunori SUZUKI ,  Takeshi WATANABE

IPC分类号： G11B5/85

CPC分类号： G11B5/85 ,  C23C14/0605 ,  C23C14/325 ,  C23C14/505 ,  Y02T50/67

摘要： An apparatus for depositing a ta-C thin film for a magnetic recording medium includes a film deposition chamber; a plasma beam formation portion for supplying a plasma beam to the film deposition chamber to form the ta-C thin film on a substrate with a magnetic recording layer thereon; a substrate holder rotatably arranged in the film deposition chamber; a tilting member for continuously changing an inclination angle of the plasma beam to a surface of the magnetic recording layer; and a rotating member for rotating the substrate about a rotation axis of the substrate holder. A control member rotates the substrate holder with the substrate thereon and operates the tilting member to continuously change the inclination angle from a minimum inclination angle to a maximum inclination angle according to an increase in film thickness of the ta-C thin film being formed by the plasma beam formation portion.

摘要翻译： 用于沉积用于磁记录介质的ta-C薄膜的设备包括成膜室; 等离子体束形成部分，用于将等离子体束提供给成膜室，以在其上具有磁记录层的基板上形成ta-C薄膜; 可旋转地布置在所述成膜室中的衬底保持架; 倾斜构件，用于将等离子体束的倾斜角度连续地改变到磁记录层的表面; 以及旋转构件，用于围绕衬底保持器的旋转轴线旋转衬底。 控制构件使衬底保持器与基板一起旋转，并且使倾斜构件根据由下述形成的ta-C薄膜的膜厚度的增加而将倾斜角度从最小倾斜角度连续地变化到最大倾斜角度 等离子束形成部分。

公开(公告)号：US20100014192A1

公开(公告)日：2010-01-21

申请号：US12500152

申请日：2009-07-09

申请人： Masahiro OKA

发明人： Masahiro OKA

IPC分类号： G11B5/82 ,  G11B5/85

CPC分类号： G11B5/851 ,  G11B5/667 ,  G11B5/7325 ,  G11B5/7379 ,  G11B5/82 ,  G11B2005/0029

摘要： A magnetic recording medium, a manufacturing method thereof, and a magnetic recording/reproducing apparatus are provided, capable, with a configuration having a magnetic recording film only on one side, of suppressing warp occurrence, and obtaining a high quality and thin-type magnetic recording medium. When forming a recording layer having at least a magnetic recording film on one main surface of a substrate by means of a vapor-phase film forming method, a thin film is formed on the other main surface of the substrate using a vapor-phase film forming method. When the recording layer is formed as a multiple layer structure, the thin film is also formed as a multiple layer structure with the same number of laminations as for the recording layer 5, and layer pairs of the same lamination order as the recording layer and the thin film are preferably formed concurrently in the same chamber.

摘要翻译： 提供一种磁记录介质，其制造方法和磁记录/再现装置，其具有仅在一侧具有磁记录膜的构造，可以抑制翘曲发生，并获得高品质和薄型磁 记录介质。 当通过气相成膜法在基板的一个主表面上形成至少具有磁记录膜的记录层时，使用气相成膜法在基板的另一个主表面上形成薄膜 方法。 当记录层形成为多层结构时，薄膜也形成为具有与记录层5相同数目的叠片的多层结构，并且与记录层和 薄膜优选同时在同一室中形成。

公开(公告)号：US20080187779A1

公开(公告)日：2008-08-07

申请号：US12026126

申请日：2008-02-05

申请人： Michiko HORIGUCHI

发明人： Michiko HORIGUCHI

IPC分类号： G11B5/62 ,  G11B5/84 ,  G11B5/85

CPC分类号： G11B5/72 ,  G11B5/8408 ,  G11B5/855

摘要： A magnetic recording medium and a method of manufacturing a magnetic recording medium are provided, in which degradation of wear resistance against a magnetic head and performances of the medium is restrained, and metal dissolving out of the magnetic recording layer and degradation of corrosion resistance due to low coverage of a protective layer are suppressed. The method of manufacturing provides a magnetic recording medium having a convex portion of a magnetic recording layer for recording information and a concave portion without a recording function on a disk substrate. An ALD protective layer is formed on the magnetic recording medium using an ALD method. The magnetic recording medium has a convex portion of a magnetic recording layer for recording information and a concave portion without a recording function on a disk substrate, and has a protective layer formed by an ALD method on the concavo-convex pattern.

摘要翻译： 提供磁记录介质和制造磁记录介质的方法，其中抑制了对磁头的耐磨性和介质的性能的降低，并且金属从磁记录层中溶出并降低了由于 抑制了保护层的低覆盖。 制造方法提供了一种具有用于记录信息的磁记录层的凸部和没有记录功能的凹部的磁记录介质。 使用ALD方法在磁记录介质上形成ALD保护层。 磁记录介质具有用于记录信息的磁记录层的凸部和在盘基板上没有记录功能的凹部，并且在凹凸图案上具有通过ALD方法形成的保护层。

公开(公告)号：US20050196644A1

公开(公告)日：2005-09-08

申请号：US11042332

申请日：2005-01-26

申请人： Ken-ichi Itoh ,  Tsugio Kumai ,  Shintaro Sato

发明人： Ken-ichi Itoh ,  Tsugio Kumai ,  Shintaro Sato

IPC分类号： G11B5/147 ,  G11B5/39 ,  G11B5/65 ,  G11B5/72 ,  G11B5/725 ,  G11B5/738 ,  G11B5/82 ,  G11B5/84 ,  G11B5/85 ,  G11B5/855 ,  G11B5/858

CPC分类号： G11B5/39 ,  G11B5/855

摘要： A magnetic recording medium is disclosed that includes a substrate; an anodic alumina film formed on the substrate; a pore formed in the anodic alumina film; a carbon layer covering the surface of the anodic alumina film and the inner wall of the pore; a magnetic particle formed on the carbon layer inside the pore; and a lubrication layer covering the carbon layer and the magnetic particle.

摘要翻译： 公开了一种包括基板的磁记录介质; 形成在基板上的阳极氧化铝膜; 在阳极氧化铝膜中形成的孔; 覆盖阳极氧化铝膜的表面和孔的内壁的碳层; 形成在孔内的碳层上的磁性颗粒; 以及覆盖碳层和磁性颗粒的润滑层。