Invention Grant
- Patent Title: Carrier ring structure and chamber systems including the same
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Application No.: US14568608Application Date: 2014-12-12
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Publication No.: US10242848B2Publication Date: 2019-03-26
- Inventor: Eli Jeon , Nick Ray Linebarger, Jr. , Sirish Reddy , Alice Hollister , Rungthiwa Methaapanon
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Penilla IP, APC
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/687 ; H01L21/683 ; C23C14/50 ; C23C16/452 ; H01J37/32 ; H01L21/285 ; C23C16/458 ; C23C16/455 ; H01L21/02 ; C23C16/52

Abstract:
A carrier ring for use in a chamber implemented for depositing films and chambers that use the carrier ring are provided. The carrier ring has an annular disk shape with an outer edge side and a wafer edge side. The carrier ring has a top carrier ring surface that extends between the outer edge side to the wafer edge side. The wafer edge side includes a lower carrier ring surface that is lower than the top carrier ring surface. The wafer edge side also includes a plurality of contact support structures. Each contact support structure is located at an edge of the lower carrier ring surface and has a height that is between the lower carrier ring surface and the top carrier ring surface, and the contact support structure has tapered edges and corners. A step is defined between the top carrier ring surface and the lower carrier ring surface, such that a top facing edge is disposed at a top of the step and a lower inner edge is disposed at the bottom of the step. Each of the top facing edge and the lower inner edge have a rounded non-sharp edge and a top of each of the contact support structures is configured for contact with a bottom edge surface of a wafer for lifting and lowering and moving the wafer.
Public/Granted literature
- US20160172165A1 Carrier Ring Structure and Chamber Systems Including the Same Public/Granted day:2016-06-16
Information query
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