Invention Grant
- Patent Title: Method for fabricating array substrate
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Application No.: US15569728Application Date: 2017-04-12
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Publication No.: US10242886B2Publication Date: 2019-03-26
- Inventor: Ce Ning , Wei Yang
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Womble Bond Dickinson (US) LLP
- Priority: CN201610278667 20160428
- International Application: PCT/CN2017/080221 WO 20170412
- International Announcement: WO2017/185988 WO 20171102
- Main IPC: H01L21/477
- IPC: H01L21/477 ; H01L21/77 ; H01L27/12 ; H01L29/66 ; H01L29/786

Abstract:
A method for fabricating an array substrate is disclosed. The method comprises: forming a first oxide semiconductor active layer of a first TFT in a GOA area of a substrate; performing a first annealing process on the first oxide semiconductor active layer at a first temperature; forming a first insulating layer which covers the first oxide semiconductor active layer; performing a second annealing process on the first oxide semiconductor active layer at a second temperature, wherein the second temperature is lower than the first temperature. This improves a forward bias stability of the first TFT and increases the device lifetime.
Public/Granted literature
- US20180247833A1 METHOD FOR FABRICATING ARRAY SUBSTRATE Public/Granted day:2018-08-30
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